PAS 5500 Illumination: Slit Uniformity
Operator:ASM    Machine:      Release:8.9.0    Date:04/19/2026  Time:18:26


   OK: Test finished successfully          

                         
Comment                : MS_SLIT_UNIF                            

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    26.000  Y :     8.878
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  2000
  Pulse Energy    [mJ] :    10.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Conventional 
  Numerical Aperture       :  0.66
  Sigma Outer              :  0.650
  Illumination mode name   : conventional     Version : 1.0.0   

Uniformity Measurement Results
  Uniformity        [%] :    1.05
  X-Tilt      [%/field] :    1.55
  Symmetrical error [%] :    0.50
  Logfile               : LI/LISU/waf.333                         

Overall Average of
  Ratio                                :      1.01  Standard Deviation :    0.01
  Intensities Spot Sensor     [mW/cm2] :   5071.52  Standard Deviation :   42.47
  Intensities Energy Sensor   [mW/cm2] :   5032.24  Standard Deviation :    1.77

Estimated Uniformity from measured data [%]
  If corrected for actual tilt                  :    0.78
  If corrected with gradientfilter              :    0.70
  If corrected for tilt and with gradientfilter :    0.33

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -0.866915
  Position Y   [mm] :   -0.226948
  Pointing X [mrad] :   -0.081336
  Pointing Y [mrad] :   -0.076481

Laser beam-drift during measurement
  Position X   [mm] :   -0.066702
  Position Y   [mm] :   -0.016638
  Pointing X [mrad] :   -0.001486
  Pointing Y [mrad] :   -0.019957



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|  12.940286 |       1.012257     |
|  10.352229 |       1.006859     |
|   7.764172 |       1.005008     |
|   5.176114 |       1.003505     |
|   2.588057 |       1.000187     |
|   0.000000 |       0.998287     |
|  -2.588057 |       0.994299     |
|  -5.176114 |       0.992221     |
|  -7.764172 |       0.991180     |
| -10.352229 |       0.992951     |
| -12.940286 |       1.003246     |
+------------+--------------------+