TAMIS for Monitoring - Projection System/Aberration Test
Operator:ASM    Machine:      Release:8.9.0    Date:03/11/2026  Time:07:21


Status           : OK                  

Number of cycles :   2



Zernike Effects Repro XY

+-------+-------------+-------------+-------------+
|1-Sigma|   Offset    |   Tilt_x    |  Curvature  |
|       |    [nm]     |   [nm/cm]   |  [nm/cm2]   |
+=======+=============+=============+=============+
| Z2    |       0.162 |       0.151 |       0.132 |
| Z3    |       1.263 |       0.947 |       0.622 |
| Z7    |       1.759 |       0.047 |       0.743 |
| Z8    |       0.649 |       1.670 |       0.868 |
| Z14   |       1.418 |       0.759 |       1.398 |
| Z15   |       1.004 |       1.594 |       0.890 |
+-------+-------------+-------------+-------------+


Zernike Effects Repro Z

+-------+-------------+-------------+-------------+
|1-Sigma|   Offset    |   Tilt_x    |  Curvature  |
|       |    [nm]     |   [nm/cm]   |  [nm/cm2]   |
+=======+=============+=============+=============+
| Z4    |       0.236 |       0.237 |       0.290 |
| Z5    |       0.047 |       0.041 |       0.177 |
| Z9    |       0.436 |       0.070 |       0.197 |
| Z12   |       0.174 |       0.112 |       0.446 |
| Z16   |       0.133 |       0.008 |       0.428 |
| Z21   |       0.244 |       0.057 |       0.598 |
+-------+-------------+-------------+-------------+