PAS 5500 Illumination: Slit Uniformity
Operator:ASM    Machine:        Release:8.9.0    Date:04/19/2026  Time:18:31


   OK: Test finished successfully          

                         
Comment                : MS_UNIF_ANL                             

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    26.000  Y :     8.840
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  2000
  Pulse Energy    [mJ] :    10.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Annular      
  Numerical Aperture       :  0.66
  Sigma Outer              :  0.700           Inner   :  0.400
  Illumination mode name   : annular          Version : 1.0.0   

Uniformity Measurement Results
  Uniformity        [%] :    0.83
  X-Tilt      [%/field] :    1.11
  Symmetrical error [%] :    0.48
  Logfile               : LI/LISU/waf.334                         

Overall Average of
  Ratio                                :      1.01  Standard Deviation :    0.01
  Intensities Spot Sensor     [mW/cm2] :   5216.52  Standard Deviation :   36.63
  Intensities Energy Sensor   [mW/cm2] :   5181.65  Standard Deviation :    1.51

Estimated Uniformity from measured data [%]
  If corrected for actual tilt                  :    0.70
  If corrected with gradientfilter              :    0.53
  If corrected for tilt and with gradientfilter :    0.28

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -0.856167
  Position Y   [mm] :   -0.252092
  Pointing X [mrad] :   -0.079072
  Pointing Y [mrad] :   -0.083434

Laser beam-drift during measurement
  Position X   [mm] :   -0.156185
  Position Y   [mm] :   -0.001620
  Pointing X [mrad] :   -0.007306
  Pointing Y [mrad] :    0.005952



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|  12.940286 |       1.009845     |
|  10.352229 |       1.005598     |
|   7.764172 |       1.003892     |
|   5.176114 |       1.001860     |
|   2.588057 |       0.999568     |
|   0.000000 |       0.997724     |
|  -2.588057 |       0.995032     |
|  -5.176114 |       0.993623     |
|  -7.764172 |       0.993256     |
| -10.352229 |       0.995222     |
| -12.940286 |       1.004381     |
+------------+--------------------+