Operator:ASM    Machine:      Release:8.9.0    Date:04/19/2026  Time:18:21


Stray Light Measurement

Comment           : Uniformity stray light measurement      

Image Field Size [mm]
  x               :    26.0   y :    26.0

Steps
  x               :    11     y :    11

Apply REMA Window : Yes   

Load Reticle      : N

Illumination Mode        : Conventional 
Numerical Aperture       :  0.66
Sigma Outer              :  0.650
Illumination mode name   : conventional     Version : 1.0.0   

Stray Light Measurement
  Maximum Stray Light Number [%] :    0.78
  Stray Light Variation      [%] :    0.30
  Log Files                      : LI/LIUM/waf.354, LI/LIUM/waf.355