Model - Projection System/Stray Light Monitoring/SAMO
Operator:ASM    Machine:      Release:8.9.0    Date:01/21/2026  Time:03:27


Header

Log file name                  : DA_SAMOS_4752.log   

Machine identification
  Machine number               :   
  Machine type                 : 0700 
  Lens number                  : 0113954a            
  Date of measurement          : 1:21:2026  
  Time of measurement          : 03:23:36 

Input parameters
  Illumination Mode            : Conventional 
  Numerical Aperture           :      0.66
  Sigma Outer                  :      0.650
  Illumination mode name       : conventional     Version : 1.0.0   
  Reticle ID                   : 45563154P034            
  Reticle layout ID            : MOSAIC_7X7          
  Number of cycles             :      1
  Attenuator transmission  [%] :     45.00

TIS parameters
  PGA gain                [dB] :      0
  Horizontal scanlength   [um] :      0.0010
  Vertical scanlength     [um] :      0.0000
  Horizontal number of samples :    100
  Vertical number of samples   :      1
  Defocus                 [um] :      0.000
  Rema setting                 : REMA HOMED     

Spot sensor parameters
  Nr of pulses per meas        :     50
  Laser frequency         [Hz] :   2000
  Energy                  [mJ] :     10.00
  Rema setting                 : REMA HOMED     

TIS
  Dark current          [bits] :   1213
  Reference intensity   [bits] :   2290



Max straylight values

block size 33 um   [%] :    2.92
block size 108 um  [%] :    2.92
block size 1100 um [%] :    1.30

Max straylight position
  X               [mm] :   -0.05
  Y               [mm] :    6.60