PAS 5500 Illumination: Slit Uniformity
Operator:ASM    Machine:       Release:8.9.0    Date:05/03/2025  Time:02:27


   OK: Test finished successfully          

                         
Comment                : MS_UNIF_ANL                             

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    26.000  Y :    12.241
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  1000
  Pulse Energy    [mJ] :    10.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Annular      
  Numerical Aperture       :  0.54
  Sigma Outer              :  0.750           Inner   :  0.450
  Illumination mode name   : annular          Version : 1.0.0   

Uniformity Measurement Results
  Uniformity        [%] :    2.99
  X-Tilt      [%/field] :   -0.32
  Symmetrical error [%] :    2.85
  Logfile               : LI/LISU/waf.1259                        

Overall Average of
  Ratio                                :      1.02  Standard Deviation :    0.02
  Intensities Spot Sensor     [mW/cm2] :    797.04  Standard Deviation :   12.86
  Intensities Energy Sensor   [mW/cm2] :    778.06  Standard Deviation :    0.13

Estimated Uniformity from measured data [%]
  If corrected for actual tilt                  :    3.07
  If corrected with gradientfilter              :    0.43
  If corrected for tilt and with gradientfilter :    0.39

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -0.020516
  Position Y   [mm] :    0.390143
  Pointing X [mrad] :    0.205068
  Pointing Y [mrad] :    0.044774

Laser beam-drift during measurement
  Position X   [mm] :    0.027325
  Position Y   [mm] :   -0.025920
  Pointing X [mrad] :   -0.000933
  Pointing Y [mrad] :   -0.001649



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|  12.941150 |       1.028101     |
|  10.352920 |       1.017237     |
|   7.764690 |       1.001515     |
|   5.176460 |       0.985550     |
|   2.588230 |       0.973955     |
|  -0.000000 |       0.968388     |
|  -2.588230 |       0.978242     |
|  -5.176460 |       0.993909     |
|  -7.764690 |       1.007905     |
| -10.352920 |       1.021130     |
| -12.941150 |       1.024068     |
+------------+--------------------+