PAS 5500 Illumination: Slit Uniformity
Operator:ASM    Machine:      Release:8.9.0    Date:05/03/2025  Time:02:22


   OK: Test finished successfully          

                         
Comment                : MS_SLIT_UNIF                            

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    26.000  Y :    12.259
  Steps           X    :    11      Y :    51
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  1000
  Pulse Energy    [mJ] :    10.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Conventional 
  Numerical Aperture       :  0.57
  Sigma Outer              :  0.750
  Illumination mode name   : conventional     Version : 1.0.0   

Uniformity Measurement Results
  Uniformity        [%] :    3.68
  X-Tilt      [%/field] :   -0.58
  Symmetrical error [%] :    3.58
  Logfile               : LI/LISU/waf.1258                        

Overall Average of
  Ratio                                :      1.04  Standard Deviation :    0.02
  Intensities Spot Sensor     [mW/cm2] :    743.70  Standard Deviation :   17.79
  Intensities Energy Sensor   [mW/cm2] :    717.91  Standard Deviation :    0.08

Estimated Uniformity from measured data [%]
  If corrected for actual tilt                  :    3.82
  If corrected with gradientfilter              :    0.48
  If corrected for tilt and with gradientfilter :    0.44

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -0.097645
  Position Y   [mm] :    0.381051
  Pointing X [mrad] :    0.196202
  Pointing Y [mrad] :    0.036709

Laser beam-drift during measurement
  Position X   [mm] :    0.062566
  Position Y   [mm] :   -0.040794
  Pointing X [mrad] :   -0.002946
  Pointing Y [mrad] :    0.001254



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|  12.941150 |       1.036047     |
|  10.352920 |       1.021671     |
|   7.764690 |       1.000011     |
|   5.176460 |       0.980138     |
|   2.588230 |       0.967552     |
|  -0.000000 |       0.962454     |
|  -2.588230 |       0.972335     |
|  -5.176460 |       0.988955     |
|  -7.764690 |       1.008608     |
| -10.352920 |       1.028817     |
| -12.941150 |       1.033411     |
+------------+--------------------+