Operator:ASM    Machine:       Release:8.9.0    Date:11/23/2025  Time:17:40


Stray Light Measurement

Comment           : Uniformity stray light measurement      

Image Field Size [mm]
  x               :    22.0   y :    22.0

Steps
  x               :    11     y :    11

Apply REMA Window : Yes   

Load Reticle      : N

Illumination Mode        : Conventional 
Numerical Aperture       :  0.57
Sigma Outer              :  0.750
Illumination mode name   : conventional     Version : 1.0.0   

Stray Light Measurement
  Maximum Stray Light Number [%] :    4.86
  Stray Light Variation      [%] :    3.03
  Log Files                      : LI/LIUM/waf.2515, LI/LIUM/waf.2516