Operator:ASM    Machine:  Release:8.9.0    Date:11/28/2025  Time:14:28


Uniformity Measurement

Comment              :                                         

Image Field Size [mm]
  x                  :    22.0   y :    22.0  Diameter :    31.1

Steps
  x                  :    11     y :    11

Measurement Type     : Pulse Mode          

Pulses               :   100

Pulse Frequency [Hz] :  1000

Pulse Energy    [mJ] :    10.00

Apply REMA Window    : Yes   
                       

Load Reticle         : N

Illumination Mode        : Conventional 
Numerical Aperture       :  0.57
Sigma Outer              :  0.750
Illumination mode name   : conventional     Version : 1.0.0   



Uniformity Measurement Result

Uniformity    [%] :    2.32
Logfile           : LI/LIUM/waf.2519                                            

Tilt  X [%/field] :    0.36  Y [%/field] :   -0.44

Overall Average of
  Ratio                              :      1.02  Standard Deviation :      0.01
  Intensities Spot Sensor   [mW/cm2] :    504.22  Standard Deviation :      7.32
  Intensities Energy Sensor [mW/cm2] :    494.06  Standard Deviation :      0.91

Estimated Uniformity from measured data [%]
  If corrected for actual tilts                  :    2.42
  If corrected with gradient filter              :    2.49
  If corrected for tilts and with gradientfilter :    2.54

Total Nr of Laserpulses since Installation [* 10^6] :       10583

Symmetric Uniformity Value       [%] :   -1.83