Model and Update Machine Constants - ...ation/Image Plane/Single Energy Combined Operator:ASML Machine: Release:4.1.0 Date:03/14/2025 Time:08:42 OK: Test finished successfully ============================================================================== Combined Focal Plane Calibration Exposure : First Second Date : 14 Mar 2025 14 Mar 2025 Time : 06:59:42 06:59:42 Machine ID : Chuck ID : 1 2 Cal. State ID : ASML_4PAR ASML_4PAR Reticle ID : 45559902P021 45559902P021 Reference Grid : Lens Type : 08 08 Lens ID : 0126986a 0126986a Elle ID : 000000 000000 Energy [mJ/cm2] : 40.0 40.0 Focus Offset [um] : -0.750 -0.750 Illumination Mode : Annular Annular Blade ID : Numerical Aperture : 0.800 0.800 Sigma Inner : 0.550 0.550 Sigma Outer : 0.850 0.850 Clean-Up Aperture : 0 0 Pol. changing ID : 1 1 Pol. shaping ID : 0 0 Meas chuck meander : OFF OFF Temperature [degC] : 22.00 22.00 Pressure [mbar] : 975.27 975.27 Wavelength [nm] : 248.332 248.332 Comments from: 'Exposure First Layer' : 'Exposure Second Layer' : 'Exposure Third Layer' : 'Measure Mark Positions' : 'Modelling' : Test Log Name : FODSC_FOC_20250314_2.tlg Measurement Machine ID: : 7670 Measurement Chuck ID: : 0 Number of Wafers Measured : 1 Number of Fields per Wafer : 1 Number of Marks per Field : 91 Number of Failed Wafers : 0 Alignment Errors in Data : 0 Wafer Size [mm] : 300 Max Field Size X [mm] : 26.0 Y [mm] : 32.0 Settings used during readout Global Align Timeout(seconds) : 100000 Number of scans per mark SA : 25 Number of scans per mark WA : 10 Modelling Options Field Curvature : yes Focus Offset : yes Focus Tilt : yes Linear Wedge : no Quadratic Wedge : no Linear Roll : no Wafer Tilt : yes Z-Mirror X-Curvature : yes Z-Mirror X Third Order : yes Z-Mirror X Fourth Order : yes Levelling MA Map Correction Usage: +-------------------------------------+----------+----------+ | | Chuck 1 | Chuck 2 | +=====================================+==========+==========+ | Percentage applied interfield [%] | 100.0 | 100.0 | | Percentage applied intrafield [%] | 100.0 | 100.0 | +-------------------------------------+----------+----------+ Model Result Lens-Related Parameters: +------------------------------------+-------------+ | | Correction | +====================================+=============+ | Wavelength shift [pm] | -0.042 | | Lens element 1 [um] | 0.025 | | Lens element 2 [um] | -0.001 | | Lens element 3 [um] | -0.008 | | Field curvature [nm/cm2] | 0.788 | | Ast curvature [nm/cm2] | 0.496 | | Reticle-stage height [um] | -0.014 | | RS linear wedge [urad] | 0.000 | | RS quadratic wedge [nm/cm2] | 0.000 | | RS linear roll [urad/m] | 0.000 | +------------------------------------+-------------+ Model Result Parameters: +-----------------------------+-----------+-----------+-----------+-----------+ | | Chuck 1 | Chuck 2 | Chuck avg | Chuck dif | +=============================+===========+===========+===========+===========+ | image height [um] | 0.001 | -0.001 | -------- | 0.002 | | image tilt (Ry) [urad] | -0.159 | 0.133 | -------- | -0.291 | | wafer tilt (Ry) [urad] | -0.035 | -0.017 | -------- | -0.018 | | z-mirror x-curv. [nm/cm2] | -0.204 | -0.204 | -0.204 | -------- | | z-mirror x-3rd. [nm/dm3] | -0.998 | -0.998 | -0.998 | -------- | | z-mirror x-4th. [nm/dm4] | 7.989 | 7.989 | 7.989 | -------- | +-----------------------------+-----------+-----------+-----------+-----------+ Intrafield Residues Before and After Correction: +--------------------------------+--------+--------+--------+ | | Before | After | Diff. | | | [nm] | [nm] | [nm] | +================================+========+========+========+ | Focus Range Chuck 1 | 59.5 | 63.0 | -3.4 | | Focus Range Chuck 2 | 64.8 | 61.4 | 3.4 | | Astigmatism Range Chuck 1 | 24.1 | 24.1 | 0.1 | | Astigmatism Range Chuck 2 | 22.2 | 22.1 | 0.1 | +--------------------------------+--------+--------+--------+ Interfield Residues Before and After Correction: +--------------------------------+--------------------------+ | | Residue | | +--------+--------+--------+ | Parameter | Before | After | Diff. | | | [nm] | [nm] | [nm] | +================================+========+========+========+ | StDev Residue Chuck 1 | 5.4 | 4.1 | 1.3 | | StDev Residue Chuck 2 | 8.3 | 5.7 | 2.6 | | Maximum Residue Chuck 1 | 10.8 | 10.0 | 0.8 | | Maximum Residue Chuck 2 | 13.1 | 12.5 | 0.6 | +--------------------------------+--------+--------+--------+ New Machine Constants Saved : N THE FOLLOWING CORRECTIONS SHOULD BE APPLIED TO THE MACHINE CONSTANTS: +------------------------------------+-------------+-------------+-------------+ | | Reference | Correction | New | +====================================+=============+=============+=============+ | LENS-RELATED MCs | | | | | | | | | | IMAGE QUALITY (KI) MCs | | | | | | | | | | Wavelength shift [pm] | -6.197 | -0.042 | -6.239 | | Reticle-stage height [um] | 0.000 | -0.000 | 0.000 | | Lens element 1 [um] | -6.173 | 0.025 | -6.148 | | Lens element 2 [um] | -3.890 | -0.001 | -3.891 | | Lens element 3 [um] | 7.660 | -0.008 | 7.651 | | | | | | | LOCO REFERENCE PARAMETERS | | | | | Field curvature [nm/cm2] | -17.447 | 0.788 | -16.659 | | Ast curvature [nm/cm2] | 19.963 | 0.496 | 20.458 | | | | | | | MEAS. SYS. INTERFEROM. (MI) MCs | | | | | | | | | | Reticle-stage height [um] | -87.416 | -0.014 | -87.431 | | RS linear wedge [urad] | 2.036 | 0.000 | 2.036 | | RS quadratic wedge [nm/cm2] | -4.406 | 0.000 | -4.406 | | RS linear roll [urad/m] | -60.252 | 0.000 | -60.252 | | | | | | | NON-LENS-RELATED MCs | | | | | | | | | | HEIGHT AND TILT EXPOSURE (KU) MCs | | | | | | | | | | Chuck: 1 | | | | | Image Height (BFO) [um] | -0.110 | 0.001 | -0.108 | | Image Ry Tilt (BFO) [urad] | 0.813 | -0.159 | 0.654 | | Wafer Ry Tilt (BFO) [urad] | -0.006 | -0.035 | -0.041 | | Z-Mirror X-Curvature [nm/cm2] | 0.218 | -0.204 | 0.014 | | Z-Mirror X 3rd Order [nm/dm3] | -6.969 | -0.998 | -7.966 | | Z-Mirror X 4th Order [nm/dm4] | -10.900 | 7.989 | -2.912 | | Lens2stage Offset Height [um] | -3.616 | -0.047 | -3.663 | | Lens2stage Offset Ry Tilt [urad] | 81.703 | 0.207 | 81.910 | | | | | | | Chuck: 2 | | | | | Image Height (BFO) [um] | -0.103 | -0.001 | -0.104 | | Image Ry Tilt (BFO) [urad] | 1.379 | 0.133 | 1.511 | | Wafer Ry Tilt (BFO) [urad] | -0.054 | -0.017 | -0.072 | | Z-Mirror X-Curvature [nm/cm2] | 0.218 | -0.204 | 0.014 | | Z-Mirror X 3rd Order [nm/dm3] | -6.969 | -0.998 | -7.966 | | Z-Mirror X 4th Order [nm/dm4] | -10.900 | 7.989 | -2.912 | | Lens2stage Offset Height [um] | -3.746 | -0.045 | -3.791 | | Lens2stage Offset Ry Tilt [urad] | -4.152 | -0.147 | -4.299 | +------------------------------------+-------------+-------------+-------------+ Interfield Summary: +------------------------------------------+----------+----------+ | | Chuck 1 | Chuck 2 | +==========================================+==========+==========+ | Wafer Tilt [urad] | -0.035 | -0.017 | | Wafer Curvature [nm/cm2] | -0.204 | -0.204 | | Z-mirror 3rd-Order [nm/dm3] | -0.998 | -0.998 | | Z-mirror 4th-Order [nm/dm4] | 7.989 | 7.989 | +------------------------------------------+----------+----------+ Intrafield Summary: Best Focus [um] : 0.001 Std. Dev. Best Focus [um] : 0.014 Intrafield Coarse Summary: +----------------------------------+-----------+-----------+ | dZ Std. Dev. | Hor | Ver | +==================================+===========+===========+ | Mean Std Dev | 5.527 | 6.156 | | Max Std Dev | 11.596 | 12.036 | +----------------------------------+-----------+-----------+ Intrafield Image Plane Error Classification: +----------------------------------+---------------------+ | | Model Params | | +----------+----------+ | | Mean | Stdev | +==================================+==========+==========+ | Focus Offset [nm] | -8.739 | 6.973 | | Image Tilt Ry [urad] | 0.001 | 0.206 | | Field Curvature [nm/cm2] | -7.450 | 1.293 | | Astigmatism Offset [nm] | -0.128 | 1.473 | | Astigmatism Tilt [urad] | 0.525 | 0.107 | | Astigmatism Curvature [nm/cm2] | -3.772 | 0.848 | | dF/dY [nm/cm] | 0.802 | 0.176 | | d2F/dY2 [nm/cm2] | 12.217 | 0.997 | | d2F/dXdY [nm/cm2] | -1.414 | 0.473 | +----------------------------------+----------+----------+ Uncorrected Values: +-------------------------------------+-------+---------+ | | Mean |Std. Dev.| +=====================================+=======+=========+ | Focus range [nm] | 62 | 4 | | Raw astigmatism [nm] | 22 | 1 | +-------------------------------------+-------+---------+ Result After Correction: +-------------------------------------+-------+---------+ | | Mean |Std. Dev.| +=====================================+=======+=========+ | Image plane deviation [nm] | 62 | 1 | | Astigmatism [nm] | 22 | 1 | +-------------------------------------+-------+---------+ Interfield Residuals: +------+---------------------+-----------+-----------+ | | Position | | | | +----------+----------+ | | | Nr | X | Y | Chuck 1 | Chuck 2 | | | [mm] | [mm] | [nm] | [nm] | +======+==========+==========+===========+===========+ | 1 | -140.000 | 0.000 | 2.967 | -5.136 | | 2 | -126.000 | 0.000 | 2.304 | -0.398 | | 3 | -112.000 | 0.000 | 1.562 | -0.439 | | 4 | -98.000 | 0.000 | 1.498 | 1.923 | | 5 | -84.000 | 0.000 | -0.746 | 0.871 | | 6 | -70.000 | 0.000 | -3.676 | -6.891 | | 7 | -56.000 | 0.000 | 0.649 | -0.842 | | 8 | -42.000 | 0.000 | 5.357 | 8.854 | | 9 | -28.000 | 0.000 | -4.336 | -0.355 | | 10 | -14.000 | 0.000 | 0.854 | 6.585 | | 11 | 0.000 | 0.000 | -6.251 | -12.374 | | 12 | 14.000 | 0.000 | -10.083 | 5.374 | | 13 | 28.000 | 0.000 | -0.200 | 6.121 | | 14 | 42.000 | 0.000 | 5.285 | 5.182 | | 15 | 56.000 | 0.000 | 0.103 | 7.912 | | 16 | 70.000 | 0.000 | -3.193 | -8.772 | | 17 | 84.000 | 0.000 | -2.228 | 4.689 | | 18 | 98.000 | 0.000 | -1.006 | -0.660 | | 19 | 112.000 | 0.000 | 2.369 | -2.809 | | 20 | 126.000 | 0.000 | -1.964 | -0.814 | | 21 | 140.000 | 0.000 | 8.081 | -5.483 | +------+----------+----------+-----------+-----------+ Intrafield Maximum Focal Coarse Data: +----+--------+--------+-----------------+--------+--------+-----------------+ | | | |Position in Field| | |Position in Field| | | | +--------+--------+ | +--------+--------+ | Nr | Hor | StDev | X | Y | Ver | StDev | X | Y | | | [nm] | [nm] | [mm] | [mm] | [nm] | [nm] | [mm] | [mm] | +====+========+========+========+========+========+========+========+========+ | 1 | 32.9 | 5.4 | 0.0 | -16.2 | 38.6 | 3.3 | -10.6 | 16.2 | | 2 | 32.3 | 3.0 | 0.0 | 16.2 | 34.0 | 3.3 | -10.6 | 16.2 | | 3 | 31.6 | 2.5 | -2.1 | 16.2 | 31.3 | 3.1 | -2.1 | 16.2 | | 4 | 30.9 | 5.9 | 2.1 | -16.2 | 31.2 | 5.9 | 0.0 | -16.2 | | 5 | 29.8 | 3.4 | 2.1 | 16.2 | 31.2 | 5.2 | -2.1 | -16.2 | +----+--------+--------+--------+--------+--------+--------+--------+--------+ Intrafield Minimum Focal Coarse Data: +----+--------+--------+-----------------+--------+--------+-----------------+ | | | |Position in Field| | |Position in Field| | | | +--------+--------+ | +--------+--------+ | Nr | Hor | StDev | X | Y | Ver | StDev | X | Y | | | [nm] | [nm] | [mm] | [mm] | [nm] | [nm] | [mm] | [mm] | +====+========+========+========+========+========+========+========+========+ | 1 | -24.2 | 4.0 | -10.6 | 0.0 | -30.8 | 7.0 | 12.7 | 0.0 | | 2 | -23.6 | 6.5 | 12.7 | 0.0 | -28.8 | 6.4 | 12.7 | 5.4 | | 3 | -23.3 | 5.0 | -8.5 | 0.0 | -27.0 | 5.7 | 12.7 | -5.4 | | 4 | -23.3 | 4.6 | -10.6 | -5.4 | -23.8 | 3.7 | 12.7 | 10.8 | | 5 | -22.7 | 3.2 | -8.5 | 5.4 | -20.9 | 7.0 | 12.7 | 0.0 | +----+--------+--------+--------+--------+--------+--------+--------+--------+