Operator:ASML     Machine:    Release:4.1.0    Date:27/06/2025    Time:19:12

  Report Filename : LUSL.99
  Report Path     : TM/Projection/StrayLightMonitoring/LUSL.log/
  Machine Type    : 850D

  File name of logfile(s) : service_data/LU/LUSL/LUSL.0135.log

  Testname                : Uniformity Stray Light Measurement
  Start Time              : Fri, 27 Jun 2025 19:12:16 091545us -0500
  Stop Time               : Fri, 27 Jun 2025 19:12:39 036609us -0500
  Execution Time          : 00:00:22
  Test Run Result         : Finished
  Test Status             : Test is Finished
  Results Validation      : In Limits
  Measurement Quality     : OK
  Comment                 : Scheduled execution (m-action)



  +----------------------+------------+-----------+----------+----------------+
  |         Step         | Start Time | Stop Time |  Status  | Execution Time |
  +======================+============+===========+==========+================+
  | Initialize drivers   | 19:12:16   | 19:12:16  | Finished | 00:00:00       |
  | Prepare machine      | 19:12:16   | 19:12:25  | Finished | 00:00:09       |
  | Perform measurements | 19:12:25   | 19:12:38  | Finished | 00:00:12       |
  | Calculate results    | 19:12:38   | 19:12:38  | Finished | 00:00:00       |
  +----------------------+------------+-----------+----------+----------------+

Scenario Inputs

  Selected Scenario        : Monitoring
  Verification Set         : Single Verification
  Overrule Inputs          : No
  Manual Scenario Selected : No


Input parameters

  pupil_shape
    Illumination mode         : Annular
    NA                        :    0.800
    DOE ID                    :   15
    Sigma
      inner                   :    0.550
      outer                   :    0.850
  Image Field Size X          :   26.00   [mm]
  Image Field Size Y          :   26.00   [mm]
  Steps in X                  :   11
  Steps in Y                  :    1
  No. of Pulses               :  200
  Pulse Frequency             : 2500
  Attenuator Transmission     :  100      [%]
  spot_sensor                 : Non-Leading
  Reticle used                : No
  REMA settings
    Rema use                  : Spot
    disable_BBS               : No
  Unicom
    Mode                      : Automatic
    Position                  :   32.595  [mm]
  Use Nominal Pulse Frequency : Yes


Verification data

  verification_type : Single Verification


Results

  Machine information
    Machine Type                        : 850D
    Lens number                         : 0126986a
  UNICOM position                       :  32.59  [mm]
  Stray light results
    Maximum    
      Stray Light Value                 :   0.788 [%]
      X position                        :   0.000 [mm]
      Y position                        :   0.000 [mm]
    At (0,0)   
      Stray Light Value                 :   0.788 [%]
      X position                        :   0.000 [mm]
      Y position                        :   0.000 [mm]
    Max. Centre-to-edge   
      Stray Light Value                 :   0.501 [%]
      X position                        : -12.943 [mm]
      Y position                        :   0.000 [mm]
    Slit Average    
      Stray Light Value                 :   0.561 [%]
      Y position                        :   0.000 [mm]
  Result with UNICOM at centre position
    UNICOM centre position              :  35.1   [mm]
    Stray Light at (0,0)
      Stray Light Value                 :   0.805 [%]
      X position                        :   0.000 [mm]
      Y position                        :   0.000 [mm]

  Stray light results per point on the line y=0
    +----+-------------------+------------+------------+
    |    | Stray Light Value | X position | Y position |
    |    |        [%]        |    [mm]    |    [mm]    |
    +====+===================+============+============+
    | 0  |             0.287 |    -12.943 |      0.000 |
    | 1  |             0.453 |    -10.354 |      0.000 |
    | 2  |             0.534 |     -7.766 |      0.000 |
    | 3  |             0.588 |     -5.177 |      0.000 |
    | 4  |             0.665 |     -2.589 |      0.000 |
    | 5  |             0.788 |      0.000 |      0.000 |
    | 6  |             0.705 |      2.589 |      0.000 |
    | 7  |             0.651 |      5.177 |      0.000 |
    | 8  |             0.607 |      7.766 |      0.000 |
    | 9  |             0.536 |     10.354 |      0.000 |
    | 10 |             0.357 |     12.943 |      0.000 |
    | 11 |             0.000 |      0.000 |      0.000 |
    | 12 |             0.000 |      0.000 |      0.000 |
    | 13 |             0.000 |      0.000 |      0.000 |
    | 14 |             0.000 |      0.000 |      0.000 |
    | 15 |             0.000 |      0.000 |      0.000 |
    | 16 |             0.000 |      0.000 |      0.000 |
    | 17 |             0.000 |      0.000 |      0.000 |
    | 18 |             0.000 |      0.000 |      0.000 |
    | 19 |             0.000 |      0.000 |      0.000 |
    | 20 |             0.000 |      0.000 |      0.000 |
    | 21 |             0.000 |      0.000 |      0.000 |
    | 22 |             0.000 |      0.000 |      0.000 |
    | 23 |             0.000 |      0.000 |      0.000 |
    | 24 |             0.000 |      0.000 |      0.000 |
    | 25 |             0.000 |      0.000 |      0.000 |
    | 26 |             0.000 |      0.000 |      0.000 |
    | 27 |             0.000 |      0.000 |      0.000 |
    | 28 |             0.000 |      0.000 |      0.000 |
    | 29 |             0.000 |      0.000 |      0.000 |
    | 30 |             0.000 |      0.000 |      0.000 |
    | 31 |             0.000 |      0.000 |      0.000 |
    | 32 |             0.000 |      0.000 |      0.000 |
    | 33 |             0.000 |      0.000 |      0.000 |
    | 34 |             0.000 |      0.000 |      0.000 |
    | 35 |             0.000 |      0.000 |      0.000 |
    | 36 |             0.000 |      0.000 |      0.000 |
    | 37 |             0.000 |      0.000 |      0.000 |
    | 38 |             0.000 |      0.000 |      0.000 |
    | 39 |             0.000 |      0.000 |      0.000 |
    | 40 |             0.000 |      0.000 |      0.000 |
    | 41 |             0.000 |      0.000 |      0.000 |
    | 42 |             0.000 |      0.000 |      0.000 |
    | 43 |             0.000 |      0.000 |      0.000 |
    | 44 |             0.000 |      0.000 |      0.000 |
    | 45 |             0.000 |      0.000 |      0.000 |
    | 46 |             0.000 |      0.000 |      0.000 |
    | 47 |             0.000 |      0.000 |      0.000 |
    | 48 |             0.000 |      0.000 |      0.000 |
    | 49 |             0.000 |      0.000 |      0.000 |
    | 50 |             0.000 |      0.000 |      0.000 |
    +----+-------------------+------------+------------+