Operator:ASML Machine: Release:4.1.0 Date:25/08/2025 Time:17:40 Report Filename : LUSU.99 Report Path : TM/Illumination/Performance/LUSU.log/ Machine Type : 850D File name of logfile(s) : service_data/LU/LUSU/LUSU.0981.log Testname : Slit Uniformity Start Time : Mon, 25 Aug 2025 17:37:48 150320us -0500 Stop Time : Mon, 25 Aug 2025 17:40:20 887691us -0500 Execution Time : 00:02:32 Test Run Result : Finished Test Status : Test is Finished Results Validation : N.A. Measurement Quality : N.A. Comment : 6Week_PM_Do_Not_Edit_Conventional +---------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +=====================+============+===========+==========+================+ | Initialize Drivers | 17:37:48 | 17:37:48 | Finished | 00:00:00 | | Prepare Machine | 17:37:48 | 17:38:58 | Finished | 00:01:10 | | Perform Measurement | 17:38:59 | 17:40:15 | Finished | 00:01:16 | | Generate Results | 17:40:16 | 17:40:20 | Finished | 00:00:04 | +---------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : Manual Slit Uniformity Verification Set : No Verification Overrule Inputs : Yes Manual Scenario Selected : Yes Measurement mode : Stepping Slit Uniformity X Size : 26.000 [mm] Slit Uniformity Y Size : 8.500 [mm] Field Uniformity X Size : 26.000 [mm] Field Uniformity Y Size : 4.500 [mm] Field Shift X : 0.000 [mm] Field Shift Y : 0.000 [mm] Steps in X Direction : 11 Steps in Y Direction : 33 Number of pulses : 100 Number of pre-expose pulses : 0 Attenuator transmission laser : 1.00 Pulse frequency : 2500 Use the nominal pulse frequency as pulse frequency : Yes Pupil shape Illumination mode : Conventional NA : 0.680 DOE ID : 15 Sigma inner : 0.000 outer : 0.710 Polarization mode : Unpolarized Spot sensor : Non-Leading REMA window REMA window X centre : 0.00000 [m] REMA window Y centre : 0.00000 [m] REMA window X size : 0.00000 [m] REMA window Y size : 0.00000 [m] REMA set_ps Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 19.254 [mm] Beam Beam Mode : Automatic Beam Positioning Position x : -1.000 [mm] Position y : 0.000 [mm] Pointing x : 0.000 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 100 [uRad] Main Results Slit Uniformity : 0.65 [%] Tilt X : -0.64 [%] Symmetrical Error : 0.26 [%] UNICOM correctable : 0.26 [%] Selected Chuck : Spot sensor WS chuck 2 Corrected Slit Uniformities Slit Uniformity if corrected for Tilt X : 0.45 [%] Slit Uniformity if corrected for Symmetrical Error : 0.27 [%] Slit Uniformity if corrected for Tilt X and Symmetrical Error : 0.05 [%] Slit Uniformity if corrected for UNICOM : 0.39 [%] Slit Uniformity if corrected for UNICOM and Tilt X : 0.30 [%] Light Source Properties Number of Laser Pulses emitted since installation [*10^6] : 39134 Illumination Properties DOE data file name : conventional DOE data file version : 2.0.1 Beam Position and Pointing Beam position X : -0.80 [mm] Beam position Y : 0.02 [mm] Beam pointing X : -0.043 [mrad] Beam pointing Y : 0.004 [mrad] Beam data valid : Yes Beam drift during measurement Beam position X : -0.06 [mm] Beam position Y : 0.06 [mm] Beam pointing X : 0.033 [mrad] Beam pointing Y : -0.013 [mrad] Beam drift during measurement valid : Yes Field Uniformity Results Field Uniformity : 0.86 [%] Tilt Y : 0.25 [%] Field Value Statistics Average Spot Sensor Light Intensity : 2972.62 [mW/cm2] Standard Deviation of the Spot Sensor Light Intensity : 14.80 [mW/cm2] Average Energy Sensor Light Intensity : 3222.85 [mW/cm2] Standard Deviation of the Energy Sensor Light Intensity : 10.76 [mW/cm2] Average Point Ratio : 1.0019 Standard Deviation of the Point Ratio : 0.0037 Corrected Intensities Average Spot Sensor Light Intensity Corrected to 1 external BP : 2972.62 [mW/cm2] Intensity constants ATP Intensity Specification : 3300 [mW/cm2] Greyfilter Coefficients Comment : Calculated a0 : -3.64940e-01 a2 : 1.53600e-02 [1/mm2] a4 : -1.67537e-04 [1/mm4] a6 : 3.05668e-08 [1/mm6] a8 : 1.91837e-09 [1/mm8] Slit Profile +----+--------+---------------+----------------------+---------+----------+ | | X | Average Ratio | Ratio per run (0..4) | (5..14) | (15..24) | | | [mm] | [%] | [%] | [%] | [%] | +====+========+===============+======================+=========+==========+ | 0 | -12.94 | 72.143 | | | | | 1 | -10.35 | 71.804 | | | | | 2 | -7.77 | 71.552 | | | | | 3 | -5.18 | 71.524 | | | | | 4 | -2.59 | 71.582 | | | | | 5 | 0.00 | 71.580 | | | | | 6 | 2.59 | 71.451 | | | | | 7 | 5.18 | 71.268 | | | | | 8 | 7.77 | 71.208 | | | | | 9 | 10.35 | 71.448 | | | | | 10 | 12.94 | 71.762 | | | | +----+--------+---------------+----------------------+---------+----------+ Verification Results +-------------------------------------------+-------------------+-----------+----------+ | | limits | | | | +---------+---------+ | | | | minimum | maximum | In Limits | Measured | +===========================================+=========+=========+===========+==========+ | Slit uniformity [%] | 0.00 | 0.00 | N.A. | 0.00 | | Avg SS light intensity [mW/cm^2] | 0.00 | 0.00 | N.A. | 0.00 | | Avg SS light intensity corr 1BP [mW/cm^2] | 0.00 | 0.00 | N.A. | 0.00 | | Average point ratio [%] | 0.00 | 0.00 | N.A. | 0.00 | | Tilt X [%] | 0.00 | 0.00 | N.A. | 0.00 | | Tilt Y [%] | 0.00 | 0.00 | N.A. | 0.00 | | Field uniformity [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity tilt X [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity symmetrical [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity tilt X & symmetrical [%] | 0.00 | 0.00 | N.A. | 0.00 | | Symmetrical error [%] | 0.00 | 0.00 | N.A. | 0.00 | | Unicom position [mm] | 0.0 | 0.0 | N.A. | 0.0 | | Pupicom position [deg] | 0.0 | 0.0 | N.A. | 0.0 | | Beam position X [mm] | 0.000 | 0.000 | N.A. | 0.000 | | Beam position Y [mm] | 0.000 | 0.000 | N.A. | 0.000 | | Beam pointing X [mrad] | 0.000 | 0.000 | N.A. | 0.000 | | Beam pointing Y [mrad] | 0.000 | 0.000 | N.A. | 0.000 | +-------------------------------------------+---------+---------+-----------+----------+