Operator:ASML Machine: Release:4.1.0 Date:07/09/2019 Time:17:14 Metrology Calibration : RS Initial Height and Tilt ================== Test Run Result : OK Numeric Test Run Result : 1 Test Status : Finished MC Status : Not Saved Results Validation : In Limits Measurement Quality : OK Converging Status : Repeat Required Test Info Used Scenario : Calibrate Machine ID : Machine type : 850D Lens ID : 0126986a ELLE ID : 000000 Chuck : Chuck 1 Reticle ID : 45558461B012 Clearout reticle : Yes Illumination mode : Conventional Numerical Aperture : 0.55 Sigma Outer : 0.65 Sigma Inner : n. a. Doe_ID : n. a. Aperture_ID : 0 Pce_ID : 1 Pse_ID : 0 Number of cycles : 3 Number of lines : 3 File Name : m7670_20190709_171332_calibrate Comment : Lens Temperature [degC] : 22.00 Lens Pressure [mbar] : 987.67 Initialize Machine : Ready Measurements Info Date/time of measurement : 07/09/2019 17:13 Perform Measurements : Ready Modelling Info Date/time of modelling : 07/09/2019 17:14 Model Measurements : Ready RS Height Correction : +----------------------------------------------+------------+ | Item | Value | +==============================================+============+ | D3 before Correction [nm/cm3] | 3.20 | | Reticle Stage Height Correction [um] | -0.706 | | Lens to Stage Offset Correction [um] | -0.036 | | D3 after Correction [nm/cm3] | -0.14 | +----------------------------------------------+------------+ Calibration Parameters : +------------------------------------------+------------+------------+ | Adjustable | Average | 3 sigma | +==========================================+============+============+ | Reticle Stage Height [um] | -1.3048 | 0.2850 | | Reticle Stage Tilt Rx [urad] | 16.8900 | 35.3076 | | Reticle Stage Tilt Ry [urad] | -2.3725 | 5.4319 | | Lens Element 1 Height [um] | -0.9267 | 0.2733 | | Lens Element 2 Height [um] | -1.2968 | 0.5235 | | Lens Element 3 Height [um] | -0.0127 | 0.2919 | | Wavelength Shift [pm] | -0.4257 | 1.2513 | | Field Curvature [nm/cm2] | -0.5589 | 6.2829 | | Astigmatism Curvature [nm/cm2] | -0.1716 | 5.4490 | +------------------------------------------+------------+------------+ Verification Average Converging Parameters : +----------------------------------+----------+----------+----------+---------+ | Adj. average | Value | Min | Max |Converged| +==================================+==========+==========+==========+=========+ | Reticle Stage Height [um] | -1.305 | -1.000 | 1.000 | N | | Reticle Stage Tilt Rx [urad] | 16.890 | -75.000 | 75.000 | Y | | Reticle Stage Tilt Ry [urad] | -2.373 | -40.000 | 40.000 | Y | | Lens Element 1 Height [um] | -0.927 | -3.000 | 3.000 | Y | | Lens Element 2 Height [um] | -1.297 | -3.000 | 3.000 | Y | | Lens Element 3 Height [um] | -0.013 | -3.000 | 3.000 | Y | +----------------------------------+----------+----------+----------+---------+ Residuals : +------------------------------------------+------------+ | Residual | 3 sigma | +==========================================+============+ | XY Plane, Dx [nm] | 5.5889 | | XY Plane, Dy [nm] | 2.7817 | | Focal Plane Horizontal, Dzh [nm] | 24.5016 | | Focal Plane Vertical, Dzv [nm] | 24.8309 | +------------------------------------------+------------+ Image Parameters : +------------------------------------------+------------+------------+ | Parameter | Average | 3 sigma | +==========================================+============+============+ | Magnification [ppm] | -0.6065 | 0.0667 | | Third Order Distortion [nm/cm3] | -4.9708 | 0.9294 | | Focus [um] | 0.0116 | 0.0016 | | Field Curvature [nm/cm2] | -0.5589 | 6.2829 | | Astigmatism Curvature [nm/cm2] | -0.1716 | 5.4490 | +------------------------------------------+------------+------------+ THE FOLLOWING CORRECTIONS SHOULD BE APPLIED TO THE MACHINE CONSTANTS: +------------------------------------------+-----------+------------+----------+ | | Reference | Correction | New | +==========================================+===========+============+==========+ | IMAGE QUALITY (KI) MCs | | | | | | | | | | Reticle Stage Height [um] | 0.000 | -0.000 | 0.000 | | Lens Element 1 Height [um] | -7.133 | 1.284 | -5.848 | | Lens Element 2 Height [um] | -5.614 | 0.769 | -4.845 | | Lens Element 3 Height [um] | 7.226 | -0.436 | 6.790 | | Wavelength Shift [pm] | -5.781 | -1.146 | -6.927 | | Field Curvature [nm/cm2] | -20.071 | -10.138 | -30.209 | | Astigmatism Curvature [nm/cm2] | 20.449 | -5.248 | 15.201 | | | | | | | HEIGHT AND TILT EXPOSURE (KU) MCs | | | | | | | | | | Chuck 1: | | | | | Image Height [um] | 2.178 | -0.146 | 2.032 | | Image Tilt Rx [urad] | -236.582 | 3.465 | -233.117 | | Image Tilt Ry [urad] | 87.002 | 1.478 | 88.480 | | | | | | | Chuck 2: | | | | | Image Height [um] | 2.050 | -0.146 | 1.905 | | Image Tilt Rx [urad] | -256.491 | 3.465 | -253.026 | | Image Tilt Ry [urad] | 1.512 | 1.478 | 2.991 | | | | | | | MEAS. SYS. INTERFEROM.(MI) MCs | | | | | | | | | | Reticle Stage Height [um] | -87.261 | -0.885 | -88.146 | | Reticle Stage Tilt Rx [urad] | -207.952 | 16.890 | -191.062 | | Reticle Stage Tilt Ry [urad] | 195.266 | -2.373 | 192.893 | | | | | | | METROLOGY GENERIC (ME) MCs | | | | | | | | | | Third Order Distortion [nm/cm3] | 0.650 | 4.914 | 5.564 | +------------------------------------------+-----------+------------+----------+ Used Test Constants +------------------------------------------------------------------------------+ | Test Constants item | +==============================================================================+ | Using defaults | +------------------------------------------------------------------------------+