Operator:ASML     Machine:7670    Release:4.1.0    Date:25/08/2025    Time:17:54

  Report Filename : EMCA.67
  Report Path     : TM/Projection/StrayLightMonitoring/EMCA.log/
  Machine Type    : 850D

  Testname                : Straylight At Multiple Opaque Squares
  Start Time              : Mon, 25 Aug 2025 17:51:17 091620us -0500
  Stop Time               : Mon, 25 Aug 2025 17:54:23 530102us -0500
  Execution Time          : 00:03:06
  Test Run Result         : Finished
  Test Status             : Test is Finished
  Comment                 : 



  +----------------------------------+------------+-----------+----------+
  |               Step               | Start Time | Stop Time |  Status  |
  +==================================+============+===========+==========+
  | Prepare machine                  | 17:51:17   | 17:53:10  | Finished |
  | Perform TIS measurements         | 17:53:10   | 17:53:58  | Finished |
  | Perform Spot sensor measurements | 17:53:58   | 17:54:04  | Finished |
  | Create testlog                   | 17:54:04   | 17:54:16  | Finished |
  | Unload reticle                   | 17:54:16   | 17:54:22  | Finished |
  | Calculate stray light            | 17:54:22   | 17:54:23  | Finished |
  +----------------------------------+------------+-----------+----------+
  +----------------+
  | Execution Time |
  +================+
  | 00:01:53       |
  | 00:00:47       |
  | 00:00:05       |
  | 00:00:12       |
  | 00:00:05       |
  | 00:00:01       |
  +----------------+





  Main Results
    Test Log Name                : 7670
    Machine Number               : 7670
    Machine Type                 : 850D
    Lens Number                  : 0126986a
    ELLE ID                      : 
    Measurement Time             : 08/25/2025 17:54
    Comment                      : 
    Pupil Shape
      Illumination mode          : Annular
      NA                         :    0.800
      DOE ID                     :   15
      Sigma
        inner                    :    0.550
        outer                    :    0.850
    Reticle ID                   : 45563154P152
    Number of Cycles             :    1
    Attenuator Factor            :    0.500
    Chuck ID                     : CHUCK_ID_1
    TIS Plate ID                 : PLATE_1
    PGA gain                     : PGA_GAIN_0DB
    Number of Samples            :  100
    Defocus                      :    0.000  [um]
    Rema Usage TIS               : Homed
    Number of Laser Pulses       :   50
    Laser Frequency              : 2500      [Hz]
    Energy                       :    8.00   [mJ]
    Rema Usage Spot Sensor       : Homed
    Dark Current                 :  607      [bits]
    Reference Blocksize          :   33      [um]
    Straylight at ref. blocksize :    1.36   [%]
    Max. Straylight position
      X                          :    3.45   [mm]
      Y                          :    6.60   [mm]

    Detailled Results
      +--------------+-----------+----------+-------------+----------+--------+
      |   position   |           |          |             |          |        |
      |------+-------+           |          |             |          |        |
      |  X   |   Y   |  sensor   | pad size | Stray Light | used ref | ref id |
      | [mm] | [mm]  |           |   [um]   |     [%]     |          |        |
      +======+=======+===========+==========+=============+==========+========+
      | 3.75 |  7.00 | TIS Ratio |      108 |        1.20 |       13 |      0 |
      | 3.75 |  6.40 | TIS Ratio |       68 |        1.26 |       13 |      0 |
      | 3.45 |  7.00 | TIS Ratio |       48 |        1.29 |       13 |      0 |
      | 3.45 |  6.80 | TIS Ratio |       36 |        1.33 |       13 |      0 |
      | 3.45 |  6.60 | TIS Ratio |       33 |        1.36 |       13 |      0 |
      | 3.45 |  6.40 | TIS Ratio |       30 |        1.38 |       13 |      0 |
      | 3.50 |  8.30 | TIS Ratio |        0 |        0.00 |        0 |     13 |
      | 3.50 | 10.80 | TIS Ratio |     1100 |        0.78 |       15 |      0 |
      | 3.50 |  8.45 | TIS Ratio |        0 |        0.00 |        0 |     15 |
      | 3.50 | 10.80 |    Spot   |     1100 |        0.78 |       14 |      0 |
      | 3.50 |  9.60 |    Spot   |        0 |        0.00 |        0 |     14 |
      +------+-------+-----------+----------+-------------+----------+--------+
      +----------+--------+--------+------+-------+
      |          |        |        |      |       |
      |          |        |        |      |       |
      | used cal | cal id | Av TIS | cal  | Av SS |
      +==========+========+========+======+=======+
      |        5 |      0 |   29.5 | -2.7 |  0.00 |
      |        5 |      0 |   30.8 | -2.7 |  0.00 |
      |        5 |      0 |   31.5 | -2.7 |  0.00 |
      |        5 |      0 |   32.4 | -2.7 |  0.00 |
      |        5 |      0 |   33.0 | -2.7 |  0.00 |
      |        5 |      0 |   33.4 | -2.7 |  0.00 |
      |        5 |      0 | 2238.8 |  0.0 |  0.00 |
      |        5 |      5 |   20.1 | -2.7 |  0.00 |
      |        0 |      5 | 2238.6 |  0.0 |  0.00 |
      |        0 |      5 |    0.0 |  0.0 |  0.01 |
      |        0 |      5 |    0.0 |  0.0 |  0.92 |
      +----------+--------+--------+------+-------+