Operator:ASML Machine: Release:4.1.0 Date:25/08/2025 Time:17:47 Report Filename : LUSU.99 Report Path : TM/Illumination/Performance/LUSU.log/ Machine Type : 850D File name of logfile(s) : service_data/LU/LUSU/LUSU.0982.log Testname : Slit Uniformity Start Time : Mon, 25 Aug 2025 17:40:47 809842us -0500 Stop Time : Mon, 25 Aug 2025 17:47:26 042706us -0500 Execution Time : 00:06:38 Test Run Result : Finished Test Status : Test is Finished Results Validation : N.A. Measurement Quality : N.A. Comment : 6Week_PM_Do_Not_Edit_Annular +---------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +=====================+============+===========+==========+================+ | Initialize Drivers | 17:40:47 | 17:45:55 | Finished | 00:05:07 | | Prepare Machine | 17:45:55 | 17:46:03 | Finished | 00:00:07 | | Perform Measurement | 17:46:04 | 17:47:21 | Finished | 00:01:17 | | Generate Results | 17:47:21 | 17:47:26 | Finished | 00:00:04 | +---------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : Manual Slit Uniformity Verification Set : No Verification Overrule Inputs : Yes Manual Scenario Selected : Yes Measurement mode : Stepping Slit Uniformity X Size : 26.000 [mm] Slit Uniformity Y Size : 8.500 [mm] Field Uniformity X Size : 26.000 [mm] Field Uniformity Y Size : 4.500 [mm] Field Shift X : 0.000 [mm] Field Shift Y : 0.000 [mm] Steps in X Direction : 11 Steps in Y Direction : 33 Number of pulses : 100 Number of pre-expose pulses : 0 Attenuator transmission laser : 1.00 Pulse frequency : 2500 Use the nominal pulse frequency as pulse frequency : Yes Pupil shape Illumination mode : Annular NA : 0.800 DOE ID : 15 Sigma inner : 0.550 outer : 0.850 Polarization mode : Unpolarized Spot sensor : Non-Leading REMA window REMA window X centre : 0.00000 [m] REMA window Y centre : 0.00000 [m] REMA window X size : 0.00000 [m] REMA window Y size : 0.00000 [m] REMA set_ps Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 32.595 [mm] Beam Beam Mode : Automatic Beam Positioning Position x : -1.000 [mm] Position y : 0.000 [mm] Pointing x : 0.000 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 100 [uRad] Main Results Slit Uniformity : 0.50 [%] Tilt X : -0.42 [%] Symmetrical Error : 0.25 [%] UNICOM correctable : 0.23 [%] Selected Chuck : Spot sensor WS chuck 2 Corrected Slit Uniformities Slit Uniformity if corrected for Tilt X : 0.35 [%] Slit Uniformity if corrected for Symmetrical Error : 0.20 [%] Slit Uniformity if corrected for Tilt X and Symmetrical Error : 0.02 [%] Slit Uniformity if corrected for UNICOM : 0.27 [%] Slit Uniformity if corrected for UNICOM and Tilt X : 0.21 [%] Light Source Properties Number of Laser Pulses emitted since installation [*10^6] : 39134 Illumination Properties DOE data file name : annular DOE data file version : 2.0.1 Beam Position and Pointing Beam position X : -0.82 [mm] Beam position Y : -0.06 [mm] Beam pointing X : 0.003 [mrad] Beam pointing Y : 0.010 [mrad] Beam data valid : Yes Beam drift during measurement Beam position X : 0.01 [mm] Beam position Y : -0.04 [mm] Beam pointing X : 0.050 [mrad] Beam pointing Y : -0.013 [mrad] Beam drift during measurement valid : Yes Field Uniformity Results Field Uniformity : 0.69 [%] Tilt Y : -0.07 [%] Field Value Statistics Average Spot Sensor Light Intensity : 2823.73 [mW/cm2] Standard Deviation of the Spot Sensor Light Intensity : 14.45 [mW/cm2] Average Energy Sensor Light Intensity : 3064.07 [mW/cm2] Standard Deviation of the Energy Sensor Light Intensity : 11.18 [mW/cm2] Average Point Ratio : 1.0011 Standard Deviation of the Point Ratio : 0.0031 Corrected Intensities Average Spot Sensor Light Intensity Corrected to 1 external BP : 2823.73 [mW/cm2] Intensity constants ATP Intensity Specification : 3300 [mW/cm2] Greyfilter Coefficients Comment : Calculated a0 : -2.25854e-01 a2 : 1.05729e-02 [1/mm2] a4 : -1.10816e-04 [1/mm4] a6 : -4.67558e-07 [1/mm6] a8 : 3.83212e-09 [1/mm8] Slit Profile +----+--------+---------------+----------------------+---------+----------+ | | X | Average Ratio | Ratio per run (0..4) | (5..14) | (15..24) | | | [mm] | [%] | [%] | [%] | [%] | +====+========+===============+======================+=========+==========+ | 0 | -12.94 | 71.973 | | | | | 1 | -10.35 | 71.756 | | | | | 2 | -7.77 | 71.462 | | | | | 3 | -5.18 | 71.387 | | | | | 4 | -2.59 | 71.448 | | | | | 5 | 0.00 | 71.463 | | | | | 6 | 2.59 | 71.395 | | | | | 7 | 5.18 | 71.281 | | | | | 8 | 7.77 | 71.257 | | | | | 9 | 10.35 | 71.513 | | | | | 10 | 12.94 | 71.685 | | | | +----+--------+---------------+----------------------+---------+----------+ Verification Results +-------------------------------------------+-------------------+-----------+----------+ | | limits | | | | +---------+---------+ | | | | minimum | maximum | In Limits | Measured | +===========================================+=========+=========+===========+==========+ | Slit uniformity [%] | 0.00 | 0.00 | N.A. | 0.00 | | Avg SS light intensity [mW/cm^2] | 0.00 | 0.00 | N.A. | 0.00 | | Avg SS light intensity corr 1BP [mW/cm^2] | 0.00 | 0.00 | N.A. | 0.00 | | Average point ratio [%] | 0.00 | 0.00 | N.A. | 0.00 | | Tilt X [%] | 0.00 | 0.00 | N.A. | 0.00 | | Tilt Y [%] | 0.00 | 0.00 | N.A. | 0.00 | | Field uniformity [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity tilt X [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity symmetrical [%] | 0.00 | 0.00 | N.A. | 0.00 | | Slit uniformity tilt X & symmetrical [%] | 0.00 | 0.00 | N.A. | 0.00 | | Symmetrical error [%] | 0.00 | 0.00 | N.A. | 0.00 | | Unicom position [mm] | 0.0 | 0.0 | N.A. | 0.0 | | Pupicom position [deg] | 0.0 | 0.0 | N.A. | 0.0 | | Beam position X [mm] | 0.000 | 0.000 | N.A. | 0.000 | | Beam position Y [mm] | 0.000 | 0.000 | N.A. | 0.000 | | Beam pointing X [mrad] | 0.000 | 0.000 | N.A. | 0.000 | | Beam pointing Y [mrad] | 0.000 | 0.000 | N.A. | 0.000 | +-------------------------------------------+---------+---------+-----------+----------+