Metrology Calibration: TIS At Multiple Illumination Settings Operator:ASML Machine: Release:4.1.0 Date:08/25/2025 Time:18:24 OK: Test finished successfully Test Info : Perform Measurements and Model Reticle ID : 45558461B012 Clearout reticle : Yes Chuck ID : Chuck 2 Perform TAMIS xy measurements : Yes No. of cycles for TAMIS xy : 2 Layout for TAMIS xy : 3x13 Perform TAMIS z measurements : Yes No. of cycles for TAMIS z : 2 Layout for TAMIS z : 3x13 Output File : 7670_250825_c2 Comment : AEA206 chuck 2 Machine ID : Machine Type : 850D Lens ID : 0126986a ELLE ID : 000000 Measurements Info Prepare Machine : Ready Measure TAMIS xy : Ready Measure TAMIS z : Ready Cleanup Machine : Ready Date/time of measurement : 08/25/2025 18:11 Lens Temperature [deg C] : 22.00 Lens Pressure [mbar] : 991.07 Modelling Info Model : Ready Input File : 7670_250825_c2 TAMIS sensitivity file used : EM/EMTA/EMTA_lens_type_08.dat Date/time of modelling : 08/25/2025 18:23 Summary of data (for TAMIS xy) +-------------------------------------------------------------------------+ | Aberrations (integrated) repro in 3 sigma | +-------+--------+------------+---------+---------------+--------+--------+ | | Offset |Offset repro|Tilt in X|Tilt in X repro| Min | Max | | | [nm] | [nm] | [nm/cm] | [nm/cm] | [nm] | [nm] | +=======+========+============+=========+===============+========+========+ | Z7 | -3.20 | 0.13 | -0.36 | 0.14 | -5.57 | -1.61 | | Z8 | 4.17 | 0.34 | 0.82 | 0.66 | 3.00 | 5.76 | +-------+--------+------------+---------+---------------+--------+--------+ +----------------------------+ |Aberrations (non-integrated)| +--------+---------+---------+ | | Min | Max | | | [nm] | [nm] | +========+=========+=========+ | Z7 | -6.09 | -0.68 | | Z8 | 2.15 | 6.68 | +--------+---------+---------+ Quality Data (non-integrated for TAMIS xy) +--------------------------+ |Aberration repro (3 sigma)| +--------+--------+--------+ | | Mean | Max | | | [nm] | [nm] | +========+========+========+ | Z7 | 0.44 | 1.28 | | Z8 | 0.39 | 0.92 | +--------+--------+--------+ Summary of data (for TAMIS z) +---------------------------------------------------------+ | Aberrations (integrated) | +-------+--------+----------------------+--------+--------+ | | Offset |Offset repro (3 sigma)| Min | Max | | | [nm] | [nm] | [nm] | [nm] | +=======+========+======================+========+========+ | Z9 | 0.12 | 0.29 | -1.96 | 1.39 | | Z12 | 1.04 | 0.21 | -1.00 | 2.62 | +-------+--------+----------------------+--------+--------+ +----------------------------+ |Aberrations (non-integrated)| +--------+---------+---------+ | | Min | Max | | | [nm] | [nm] | +========+=========+=========+ | Z9 | -3.07 | 1.78 | | Z12 | -1.22 | 3.67 | +--------+---------+---------+ Quality Data (non-integrated for TAMIS z) +--------------------------+ |Aberration repro (3 sigma)| +--------+--------+--------+ | | Mean | Max | | | [nm] | [nm] | +========+========+========+ | Z9 | 0.42 | 0.99 | | Z12 | 1.17 | 2.62 | +--------+--------+--------+ Aberration data (integrated for TAMIS xy) +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z7 | Z7 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | -5.57 | 0.55 | | -10.60 | -2.99 | 0.72 | | -8.48 | -1.61 | 0.90 | | -6.36 | -1.94 | 0.51 | | -4.24 | -2.94 | 0.76 | | -2.12 | -2.30 | 0.45 | | 0.00 | -2.09 | 0.27 | | 2.12 | -2.71 | 0.53 | | 4.24 | -2.43 | 0.53 | | 6.36 | -4.10 | 0.65 | | 8.48 | -4.95 | 0.64 | | 10.60 | -4.99 | 0.38 | | 12.72 | -3.01 | 0.90 | +--------+--------+--------+ +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z8 | Z8 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 3.07 | 0.28 | | -10.60 | 3.00 | 0.49 | | -8.48 | 3.08 | 0.97 | | -6.36 | 3.47 | 0.40 | | -4.24 | 3.92 | 0.32 | | -2.12 | 4.68 | 0.36 | | 0.00 | 5.03 | 1.10 | | 2.12 | 4.92 | 0.60 | | 4.24 | 4.53 | 0.81 | | 6.36 | 3.98 | 1.27 | | 8.48 | 3.97 | 0.57 | | 10.60 | 4.77 | 1.21 | | 12.72 | 5.76 | 0.97 | +--------+--------+--------+ Aberration data (integrated for TAMIS z) +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z9 | Z9 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 1.10 | 0.43 | | -10.60 | 0.11 | 0.37 | | -8.48 | 0.41 | 0.25 | | -6.36 | 0.61 | 0.26 | | -4.24 | -0.27 | 0.43 | | -2.12 | -1.80 | 0.58 | | 0.00 | -1.96 | 1.12 | | 2.12 | -1.47 | 0.14 | | 4.24 | 0.11 | 0.52 | | 6.36 | 1.15 | 0.20 | | 8.48 | 1.28 | 0.35 | | 10.60 | 0.83 | 0.28 | | 12.72 | 1.39 | 0.47 | +--------+--------+--------+ +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z12 | Z12 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 2.50 | 0.85 | | -10.60 | -0.27 | 0.59 | | -8.48 | -0.46 | 1.14 | | -6.36 | 0.88 | 0.54 | | -4.24 | 1.69 | 0.73 | | -2.12 | 1.66 | 0.77 | | 0.00 | 2.55 | 0.96 | | 2.12 | 2.62 | 1.24 | | 4.24 | 2.33 | 0.55 | | 6.36 | 1.49 | 0.53 | | 8.48 | -0.27 | 0.76 | | 10.60 | -1.00 | 0.58 | | 12.72 | -0.21 | 0.44 | +--------+--------+--------+ Aberration data (non-integrated for TAMIS xy) +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z7 | Z7 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | -5.28 | 0.46 | | -12.72 | 0.000 | -6.09 | 0.33 | | -12.72 | -1.802 | -5.35 | 0.76 | | -10.60 | 1.802 | -3.65 | 0.15 | | -10.60 | 0.000 | -2.34 | 0.04 | | -10.60 | -1.802 | -2.98 | 0.00 | | -8.48 | 1.802 | -0.68 | 0.12 | | -8.48 | 0.000 | -2.20 | 0.17 | | -8.48 | -1.802 | -1.95 | 0.57 | | -6.36 | 1.802 | -1.42 | 0.31 | | -6.36 | 0.000 | -2.27 | 0.19 | | -6.36 | -1.802 | -2.12 | 0.22 | | -4.24 | 1.802 | -2.16 | 0.36 | | -4.24 | 0.000 | -3.24 | 0.38 | | -4.24 | -1.802 | -3.41 | 0.31 | | -2.12 | 1.802 | -2.31 | 0.17 | | -2.12 | 0.000 | -1.91 | 0.48 | | -2.12 | -1.802 | -2.69 | 0.22 | | 0.00 | 1.802 | -2.28 | 0.04 | | 0.00 | 0.000 | -2.08 | 0.27 | | 0.00 | -1.802 | -1.92 | 0.64 | | 2.12 | 1.802 | -2.72 | 0.65 | | 2.12 | 0.000 | -3.17 | 0.12 | | 2.12 | -1.802 | -2.26 | 0.30 | | 4.24 | 1.802 | -2.92 | 0.05 | | 4.24 | 0.000 | -2.35 | 0.54 | | 4.24 | -1.802 | -2.02 | 0.39 | | 6.36 | 1.802 | -4.76 | 0.08 | | 6.36 | 0.000 | -3.69 | 0.24 | | 6.36 | -1.802 | -3.84 | 0.32 | | 8.48 | 1.802 | -5.26 | 0.55 | | 8.48 | 0.000 | -5.29 | 0.45 | | 8.48 | -1.802 | -4.31 | 0.27 | | 10.60 | 1.802 | -4.81 | 1.28 | | 10.60 | 0.000 | -5.02 | 0.00 | | 10.60 | -1.802 | -5.15 | 0.02 | | 12.72 | 1.802 | -2.12 | 1.02 | | 12.72 | 0.000 | -3.41 | 0.45 | | 12.72 | -1.802 | -3.48 | 0.59 | +--------+---------+--------+--------+ +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z8 | Z8 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | 2.96 | 0.19 | | -12.72 | 0.000 | 2.94 | 0.26 | | -12.72 | -1.802 | 3.30 | 0.61 | | -10.60 | 1.802 | 3.42 | 0.47 | | -10.60 | 0.000 | 2.75 | 0.92 | | -10.60 | -1.802 | 2.83 | 0.40 | | -8.48 | 1.802 | 3.90 | 0.20 | | -8.48 | 0.000 | 3.18 | 0.34 | | -8.48 | -1.802 | 2.15 | 0.44 | | -6.36 | 1.802 | 3.72 | 0.40 | | -6.36 | 0.000 | 3.55 | 0.44 | | -6.36 | -1.802 | 3.13 | 0.58 | | -4.24 | 1.802 | 4.18 | 0.26 | | -4.24 | 0.000 | 3.75 | 0.60 | | -4.24 | -1.802 | 3.82 | 0.33 | | -2.12 | 1.802 | 4.99 | 0.48 | | -2.12 | 0.000 | 4.45 | 0.49 | | -2.12 | -1.802 | 4.60 | 0.22 | | 0.00 | 1.802 | 3.90 | 0.01 | | 0.00 | 0.000 | 5.38 | 0.33 | | 0.00 | -1.802 | 5.80 | 0.07 | | 2.12 | 1.802 | 4.57 | 0.03 | | 2.12 | 0.000 | 4.66 | 0.12 | | 2.12 | -1.802 | 5.54 | 0.44 | | 4.24 | 1.802 | 3.72 | 0.38 | | 4.24 | 0.000 | 4.78 | 0.54 | | 4.24 | -1.802 | 5.09 | 0.14 | | 6.36 | 1.802 | 3.06 | 0.34 | | 6.36 | 0.000 | 3.61 | 0.02 | | 6.36 | -1.802 | 5.27 | 0.23 | | 8.48 | 1.802 | 3.41 | 0.21 | | 8.48 | 0.000 | 4.10 | 0.17 | | 8.48 | -1.802 | 4.41 | 0.30 | | 10.60 | 1.802 | 3.69 | 0.39 | | 10.60 | 0.000 | 4.74 | 0.23 | | 10.60 | -1.802 | 5.88 | 0.21 | | 12.72 | 1.802 | 4.99 | 0.09 | | 12.72 | 0.000 | 5.61 | 0.89 | | 12.72 | -1.802 | 6.68 | 0.27 | +--------+---------+--------+--------+ Aberration data (non-integrated for TAMIS z) +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z9 | Z9 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | 1.35 | 0.05 | | -12.72 | 0.000 | 0.67 | 0.39 | | -12.72 | -1.802 | 1.29 | 0.29 | | -10.60 | 1.802 | 0.28 | 0.18 | | -10.60 | 0.000 | -0.17 | 0.39 | | -10.60 | -1.802 | 0.23 | 0.85 | | -8.48 | 1.802 | 0.40 | 0.18 | | -8.48 | 0.000 | 0.25 | 0.15 | | -8.48 | -1.802 | 0.58 | 0.65 | | -6.36 | 1.802 | 0.42 | 0.33 | | -6.36 | 0.000 | 0.66 | 0.08 | | -6.36 | -1.802 | 0.76 | 0.60 | | -4.24 | 1.802 | -0.29 | 0.02 | | -4.24 | 0.000 | -0.64 | 0.14 | | -4.24 | -1.802 | 0.13 | 0.11 | | -2.12 | 1.802 | -2.05 | 0.99 | | -2.12 | 0.000 | -2.05 | 0.78 | | -2.12 | -1.802 | -1.30 | 0.28 | | 0.00 | 1.802 | -1.66 | 0.79 | | 0.00 | 0.000 | -3.07 | 0.35 | | 0.00 | -1.802 | -1.13 | 0.28 | | 2.12 | 1.802 | -1.48 | 0.17 | | 2.12 | 0.000 | -1.35 | 0.14 | | 2.12 | -1.802 | -1.58 | 0.14 | | 4.24 | 1.802 | 0.42 | 0.08 | | 4.24 | 0.000 | -0.38 | 0.57 | | 4.24 | -1.802 | 0.28 | 0.69 | | 6.36 | 1.802 | 1.31 | 0.29 | | 6.36 | 0.000 | 1.00 | 0.15 | | 6.36 | -1.802 | 1.16 | 0.27 | | 8.48 | 1.802 | 1.31 | 0.29 | | 8.48 | 0.000 | 0.99 | 0.25 | | 8.48 | -1.802 | 1.54 | 0.59 | | 10.60 | 1.802 | 0.96 | 0.61 | | 10.60 | 0.000 | 0.94 | 0.17 | | 10.60 | -1.802 | 0.60 | 0.20 | | 12.72 | 1.802 | 1.45 | 0.22 | | 12.72 | 0.000 | 0.95 | 0.40 | | 12.72 | -1.802 | 1.78 | 0.13 | +--------+---------+--------+--------+ +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z12 | Z12 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | 2.32 | 0.31 | | -12.72 | 0.000 | 3.17 | 1.15 | | -12.72 | -1.802 | 2.00 | 1.69 | | -10.60 | 1.802 | -0.18 | 1.26 | | -10.60 | 0.000 | -0.59 | 1.36 | | -10.60 | -1.802 | -0.03 | 0.53 | | -8.48 | 1.802 | -1.08 | 0.71 | | -8.48 | 0.000 | -0.88 | 1.81 | | -8.48 | -1.802 | 0.58 | 1.02 | | -6.36 | 1.802 | 0.85 | 0.98 | | -6.36 | 0.000 | 1.29 | 0.17 | | -6.36 | -1.802 | 0.52 | 0.84 | | -4.24 | 1.802 | 1.50 | 0.30 | | -4.24 | 0.000 | 2.30 | 0.64 | | -4.24 | -1.802 | 1.26 | 1.45 | | -2.12 | 1.802 | 2.29 | 0.78 | | -2.12 | 0.000 | 1.44 | 1.27 | | -2.12 | -1.802 | 1.24 | 0.97 | | 0.00 | 1.802 | 3.04 | 0.34 | | 0.00 | 0.000 | 2.81 | 1.59 | | 0.00 | -1.802 | 1.79 | 1.85 | | 2.12 | 1.802 | 3.67 | 1.35 | | 2.12 | 0.000 | 2.27 | 1.58 | | 2.12 | -1.802 | 1.93 | 1.82 | | 4.24 | 1.802 | 2.75 | 1.23 | | 4.24 | 0.000 | 2.05 | 0.50 | | 4.24 | -1.802 | 2.18 | 0.56 | | 6.36 | 1.802 | 1.75 | 0.54 | | 6.36 | 0.000 | 1.37 | 0.14 | | 6.36 | -1.802 | 1.36 | 1.75 | | 8.48 | 1.802 | -0.19 | 2.62 | | 8.48 | 0.000 | -0.43 | 0.05 | | 8.48 | -1.802 | -0.19 | 1.20 | | 10.60 | 1.802 | -0.84 | 1.50 | | 10.60 | 0.000 | -0.94 | 0.56 | | 10.60 | -1.802 | -1.22 | 1.36 | | 12.72 | 1.802 | -0.48 | 1.07 | | 12.72 | 0.000 | -0.20 | 0.25 | | 12.72 | -1.802 | 0.06 | 0.63 | +--------+---------+--------+--------+ Sensitivity data (for TAMIS xy) +-------------------------------------------------------------------+ | Shifts in X | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z2 | Z7 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.650 | 0.890 | annular | -1.270 | -1.559 | Y | | 0.75 | 0.495 | 0.751 | annular | -1.270 | 0.194 | Y | | 0.65 | 0.135 | 0.385 | annular | -1.270 | 2.004 | Y | | 0.60 | 0.570 | 0.890 | annular | -1.270 | 0.606 | Y | +--------+---------+---------+------------+---------+---------+-----+ +-------------------------------------------------------------------+ | Shifts in Y | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z3 | Z8 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.650 | 0.890 | annular | -1.270 | -1.559 | Y | | 0.75 | 0.495 | 0.751 | annular | -1.270 | 0.194 | Y | | 0.65 | 0.135 | 0.385 | annular | -1.270 | 2.004 | Y | | 0.60 | 0.570 | 0.890 | annular | -1.270 | 0.606 | Y | +--------+---------+---------+------------+---------+---------+-----+ Sensitivity data (for TAMIS z) +-------------------------------------------------------------------+ | Shifts in BF | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z4 | Z9 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.360 | 0.600 | annular | 5.264 | -1.697 | Y | | 0.80 | 0.505 | 0.745 | annular | 5.264 | 0.268 | Y | | 0.80 | 0.650 | 0.890 | annular | 5.264 | 1.996 | Y | | 0.60 | 0.145 | 0.417 | annular | 5.264 | -9.580 | Y | +--------+---------+---------+------------+---------+---------+-----+ +-------------------------------------------------------------------+ | Shifts in AST | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z5 | Z12 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.360 | 0.600 | annular | -5.252 | 1.885 | Y | | 0.80 | 0.505 | 0.745 | annular | -5.252 | 2.295 | Y | | 0.80 | 0.650 | 0.890 | annular | -5.252 | 2.513 | Y | | 0.60 | 0.145 | 0.417 | annular | -5.252 | 8.249 | Y | +--------+---------+---------+------------+---------+---------+-----+ THE FOLLOWING CORRECTIONS SHOULD BE APPLIED TO THE MACHINE CONSTANTS: +-----------------------------------+------------+------------+------------+ | | Reference | Correction | New | +===================================+============+============+============+ | IMAGE QUALITY (KI) MCs | | | | | | | | | | Reticle Stage Height [um] | 0.000 | 0.000 | 0.000 | | Lens Element 1 [um] | -6.173 | 0.031 | -6.141 | | Lens Element 2 [um] | -3.890 | -0.162 | -4.053 | | Lens Element 3 [um] | 7.660 | -0.201 | 7.459 | | Wavelength Shift [pm] | -6.197 | 0.507 | -5.689 | | | | | | | MEAS. SYS. INTERFEROM. (MI) MCs | | | | | | | | | | Reticle Stage Height [um] | -87.416 | -0.070 | -87.486 | | | | | | | HEIGHT AND TILT EXPOSURE (KU) MCs | | | | | | | | | | Chuck: 1 | | | | | Lens to Stage Offset [um] | -3.616 | -0.084 | -3.700 | | | | | | | Chuck: 2 | | | | | Lens to Stage Offset [um] | -3.746 | -0.084 | -3.830 | +-----------------------------------+------------+------------+------------+ New Machine Constants Saved : No