Operator:ASML          Machine:         Release:4.1.0         Date:25/08/2025         Time:17:49

  Report Filename : ODAR.99
  Report Path     : TM/Illumination/Performance/ODAR.log/
  Machine Type    : 850D

  File name of logfile(s) : service_data/OD/ODAR/ODAR.rawdata.0149.log

  Testname                : Dose Accuracy and Repeatability Performance
  Start Time              : Mon, 25 Aug 2025 17:47:45 244763us -0500
  Stop Time               : Mon, 25 Aug 2025 17:49:09 027206us -0500
  Execution Time          : 00:01:23
  Test Run Result         : Finished
  Test Status             : Test is Finished
  Results Validation      : N.A.
  Measurement Quality     : N.A.
  Comment                 : 6Week_PM_Do_Not_Edit



  +----------------------+------------+-----------+----------+----------------+
  |         Step         | Start Time | Stop Time |  Status  | Execution Time |
  +======================+============+===========+==========+================+
  | Initialize Drivers   | 17:47:45   | 17:47:45  | Finished | 00:00:00       |
  | Prepare Machine      | 17:47:45   | 17:47:48  | Finished | 00:00:02       |
  | Perform Measurements | 17:47:48   | 17:49:09  | Finished | 00:01:20       |
  | Generate Results     | 17:49:09   | 17:49:09  | Finished | 00:00:00       |
  +----------------------+------------+-----------+----------+----------------+

Scenario Inputs

  Selected Scenario        : Manual ODAR
  Verification Set         : No Verification
  Overrule Inputs          : Yes
  Manual Scenario Selected : Yes


  Light Source Info
    Light-source Architecture : Laser
    Light-source Type         : Cymer Laser: ELS 6610K 20W, 8mJ, 2.5kHz
    Light-source Wave-length  : 248nm

  requested_dose
    +---+------------+----------+
    |   | Apply dose |   dose   |
    |   |            | [mJ/cm2] |
    +===+============+==========+
    | 0 | Yes        |     2.00 |
    | 1 | Yes        |     5.00 |
    | 2 | Yes        |    10.00 |
    | 3 | Yes        |    15.00 |
    | 4 | Yes        |    20.00 |
    | 5 | Yes        |    30.00 |
    | 6 | Yes        |    40.00 |
    | 7 | Yes        |    50.00 |
    | 8 | No         |     0.00 |
    | 9 | No         |     0.00 |
    +---+------------+----------+

  Number of Repeats             : 25            [-]
  Image Size and Offset
    Size X                      :  2.000        [mm]
    Size Y                      :  4.000        [mm]
    Shift X                     :  0.000        [mm]
    Shift Y                     :  0.000        [mm]
  Spot Sensor Position in Image
    X                           :  0.000        [mm]
    Y                           :  0.000        [mm]
  Scan Mode                     : FORWARD
  Energy Mode                   : SEC
  Save buffer data              : No
  pupil_shape
    Illumination mode           : Annular
    NA                          :  0.800
    DOE ID                      : 15
    Sigma
      inner                     :  0.550
      outer                     :  0.850
  spot_sensor_id                : Non-Leading
  rema_spec
    Rema use                    : Image
    disable_BBS                 : No
  rema_window


  dose_measurement
    +---+----------+----------+----------+----------+--------+---------+----------+
    |   |   Dose   | Avg. SS  | Min. SS  | Max. SS  |  Acc.  | Repeat. | Avg. ES  |
    |   | [mJ/cm2] | [mJ/cm2] | [mJ/cm2] | [mJ/cm2] |  [%]   |   [%]   | [mJ/cm2] |
    +===+==========+==========+==========+==========+========+=========+==========+
    | 0 |    2.000 |    1.975 |    1.971 |    1.979 | -1.255 |   0.214 |    3.736 |
    | 1 |    5.000 |    4.971 |    4.962 |    4.975 | -0.579 |   0.137 |    9.340 |
    | 2 |   10.000 |    9.999 |    9.987 |   10.007 | -0.013 |   0.099 |   18.689 |
    | 3 |   15.000 |   15.024 |   15.014 |   15.035 |  0.158 |   0.067 |   28.028 |
    | 4 |   20.000 |   20.050 |   20.028 |   20.067 |  0.249 |   0.097 |   37.388 |
    | 5 |   30.000 |   30.070 |   30.051 |   30.094 |  0.232 |   0.071 |   56.054 |
    | 6 |   40.000 |   40.114 |   40.091 |   40.141 |  0.286 |   0.062 |   74.006 |
    | 7 |   50.000 |   50.181 |   50.155 |   50.213 |  0.361 |   0.058 |   92.729 |
    | 8 |    0.000 |    0.000 |    0.000 |    0.000 |  0.000 |   0.000 |    0.000 |
    | 9 |    0.000 |    0.000 |    0.000 |    0.000 |  0.000 |   0.000 |    0.000 |
    +---+----------+----------+----------+----------+--------+---------+----------+

  Validation Report
    +---+---------------------+---------------------+
    |   |      Accuracy       |    Repeatability    |
    |   +-------+-------+-----+-------+-------+-----+
    |   |  Cur  | Limit | Val |  Cur  | Limit | Val |
    +===+=======+=======+=====+=======+=======+=====+
    | 0 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 1 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 2 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 3 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 4 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 5 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 6 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 7 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 8 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    | 9 | 0.000 | 0.000 |     | 0.000 | 0.000 |     |
    +---+-------+-------+-----+-------+-------+-----+