Operator:ASML Machine: Release:4.1.0 Date:05/10/2012 Time:15:05 Report Filename : LUPM.41 Report Path : TM/Illumination/Performance/LUPM.log/ Machine Type : 850D Testname : TIS Pupil Measurement Start Time : Fri, 05 Oct 2012 14:54:59 272584us +0200 Stop Time : Fri, 05 Oct 2012 15:05:47 859828us +0200 Execution Time : 00:10:48 Test Run Result : Finished Test Status : Test is Finished Results Validation : N.A. Measurement Quality : N.A. Comment : large conventional +----------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +======================+============+===========+==========+================+ | Initialize drivers | 14:54:59 | 14:55:00 | Finished | 00:00:00 | | Prepare machine | 14:55:00 | 14:55:21 | Finished | 00:00:21 | | Perform measurements | 14:55:21 | 15:04:38 | Finished | 00:09:17 | | Perform analysis | 15:04:38 | 15:05:47 | Finished | 00:01:09 | +----------------------+------------+-----------+----------+----------------+ Scenario Inputs Selected Scenario : Manual Pupil Measurement Verification Set : No Verification Overrule Inputs : Yes Manual Scenario Selected : Yes Input Values Perform measurement : Yes Perform analysis : Yes Perform correction : No Raw data file : service_data/LU/LUPM/LUPM_RAW_m7670.36 Save avg pupil as picture file : No Picture file : Measurement input values pupil_shape Illumination mode : Conventional NA : 0.800 DOE ID : 15 Sigma inner : 0.000 outer : 0.850 Start beam Beam Mode : Automatic Beam Positioning Position x : -0.600 [mm] Position y : 0.000 [mm] Pointing x : -0.150 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 100 [uRad] Image field size : 1.400 [mm] No. of samples : 101 Defocus : 500 [um] Prefered defocus direction : Below focus REMA mode : Around pinhole Binning factor : 11 PGA gain : 25 dB Waferstage chuck : Chuck 2 TIS ratio sensor : TIS 1 Trp Measurement sequence : Static pupil 5 x 1 (FLEXQUEUE) Used defocus direction : Below focus Used design constants Measurement sequence : Static pupil 5 x 1 (FLEXQUEUE) Reticle id. : 45562181P008 Analysis mode : Static pupil analysis Pinhole information +----+----------------+----------------+ | | Marker type | Pinhole number | +====+================+================+ | 0 | Pinhole marker | 118 | | 1 | Pinhole marker | 121 | | 2 | Pinhole marker | 124 | | 3 | Pinhole marker | 127 | | 4 | Pinhole marker | 130 | | 5 | Pinhole marker | 0 | | 6 | Pinhole marker | 0 | | 7 | Pinhole marker | 0 | | 8 | Pinhole marker | 0 | | 9 | Pinhole marker | 0 | | 10 | Pinhole marker | 0 | | 11 | Pinhole marker | 0 | | 12 | Pinhole marker | 0 | | 13 | Pinhole marker | 0 | | 14 | Pinhole marker | 0 | | 15 | Pinhole marker | 0 | | 16 | Pinhole marker | 0 | | 17 | Pinhole marker | 0 | | 18 | Pinhole marker | 0 | | 19 | Pinhole marker | 0 | | 20 | Pinhole marker | 0 | | 21 | Pinhole marker | 0 | | 22 | Pinhole marker | 0 | | 23 | Pinhole marker | 0 | | 24 | Pinhole marker | 0 | | 25 | Pinhole marker | 0 | | 26 | Pinhole marker | 0 | +----+----------------+----------------+ +----+-----------------------------------+ | | Reticle y-offset (WS coordinates) | | | [mm] | +====+===================================+ | 0 | 0.000 | | 1 | 0.000 | | 2 | 0.000 | | 3 | 0.000 | | 4 | 0.000 | | 5 | 0.000 | | 6 | 0.000 | | 7 | 0.000 | | 8 | 0.000 | | 9 | 0.000 | | 10 | 0.000 | | 11 | 0.000 | | 12 | 0.000 | | 13 | 0.000 | | 14 | 0.000 | | 15 | 0.000 | | 16 | 0.000 | | 17 | 0.000 | | 18 | 0.000 | | 19 | 0.000 | | 20 | 0.000 | | 21 | 0.000 | | 22 | 0.000 | | 23 | 0.000 | | 24 | 0.000 | | 25 | 0.000 | | 26 | 0.000 | +----+-----------------------------------+ Machine info of measurement part Machine number : 7670 Machine type : 850D Software release : 4.1.0.c Time of measurement : Fri, 05 Oct 2012 14:55:00 417354us + Cadisse information Table name : conventional Version : 2.0.1 Beam position and pointing Beam position X : -0.78 [mm] Beam position Y : -0.02 [mm] Beam pointing X : -0.19 [mrad] Beam pointing Y : 0.02 [mrad] Beam data valid : Yes Results Analyse logfile : service_data/LU/LUPM/LUPM_log_m76 TIS sensitivity map TIS sensitivity map valid : No Pupil corrected with TIS sensitivity map : No Values all pinholes Average Pupil Values +--------------------------+---------+---------+-------+---------+ | | Minimum | Maximum | Range | Average | +==========================+=========+=========+=======+=========+ | Sigma Inner [10%] | 0.268 | 0.270 | 0.002 | 0.270 | | Sigma Outer [90%] | 0.841 | 0.845 | 0.004 | 0.844 | | Ellipticity [%] | -3.661 | -2.845 | 0.815 | -3.226 | | Ellipticity (45 Deg) [%] | -1.522 | -0.134 | 1.389 | -0.758 | | Quadrant balance [%] | 0.263 | 0.920 | 0.657 | 0.558 | | cQuadrant balance [%] | 1.677 | 2.204 | 0.527 | 1.873 | | Balance X [%] | 0.045 | 0.205 | 0.160 | 0.122 | | Balance Y [%] | 0.036 | 0.300 | 0.264 | 0.139 | +--------------------------+---------+---------+-------+---------+ Average Pole Information Pole 1 Pole 2 Pole 3 Pole 4 Pole 5 Pole 6 Pole 7 Pole 8 Pole group info Group 1 Group 2 Group 3 Inter Group Max Value Values per pinhole +----+--------------------------------------------+-------------------+ | | Pinhole position (Waferstage coordinates) | Pupil values | | +------------+------------+------------------+-------------------+ | | Position X | Position Y | Reticle y-offset | Sigma inner [10%] | | | [mm] | [mm] | [mm] | | +====+============+============+==================+===================+ | 0 | -12.72 | 0.00 | 0.00 | 0.2700 | | 1 | -6.36 | 0.00 | 0.00 | 0.2703 | | 2 | 0.00 | 0.00 | 0.00 | 0.2701 | | 3 | 6.36 | 0.00 | 0.00 | 0.2690 | | 4 | 12.72 | 0.00 | 0.00 | 0.2682 | | 5 | 0.00 | 0.00 | 0.00 | 0.0000 | | 6 | 0.00 | 0.00 | 0.00 | 0.0000 | | 7 | 0.00 | 0.00 | 0.00 | 0.0000 | | 8 | 0.00 | 0.00 | 0.00 | 0.0000 | | 9 | 0.00 | 0.00 | 0.00 | 0.0000 | | 10 | 0.00 | 0.00 | 0.00 | 0.0000 | | 11 | 0.00 | 0.00 | 0.00 | 0.0000 | | 12 | 0.00 | 0.00 | 0.00 | 0.0000 | | 13 | 0.00 | 0.00 | 0.00 | 0.0000 | | 14 | 0.00 | 0.00 | 0.00 | 0.0000 | | 15 | 0.00 | 0.00 | 0.00 | 0.0000 | | 16 | 0.00 | 0.00 | 0.00 | 0.0000 | | 17 | 0.00 | 0.00 | 0.00 | 0.0000 | | 18 | 0.00 | 0.00 | 0.00 | 0.0000 | | 19 | 0.00 | 0.00 | 0.00 | 0.0000 | | 20 | 0.00 | 0.00 | 0.00 | 0.0000 | | 21 | 0.00 | 0.00 | 0.00 | 0.0000 | | 22 | 0.00 | 0.00 | 0.00 | 0.0000 | | 23 | 0.00 | 0.00 | 0.00 | 0.0000 | | 24 | 0.00 | 0.00 | 0.00 | 0.0000 | | 25 | 0.00 | 0.00 | 0.00 | 0.0000 | | 26 | 0.00 | 0.00 | 0.00 | 0.0000 | +----+------------+------------+------------------+-------------------+ +----+--------------------------------------------------------+ | | Pupil values | | +-------------------+-------------+----------------------+ | | Sigma outer [90%] | Ellipticity | Ellipticity (45 Deg) | | | | [%] | [%] | +====+===================+=============+======================+ | 0 | 0.8414 | -3.7 | -0.1 | | 1 | 0.8436 | -3.2 | -0.4 | | 2 | 0.8444 | -2.8 | -0.3 | | 3 | 0.8451 | -3.3 | -1.4 | | 4 | 0.8450 | -3.1 | -1.5 | | 5 | 0.0000 | 0.0 | 0.0 | | 6 | 0.0000 | 0.0 | 0.0 | | 7 | 0.0000 | 0.0 | 0.0 | | 8 | 0.0000 | 0.0 | 0.0 | | 9 | 0.0000 | 0.0 | 0.0 | | 10 | 0.0000 | 0.0 | 0.0 | | 11 | 0.0000 | 0.0 | 0.0 | | 12 | 0.0000 | 0.0 | 0.0 | | 13 | 0.0000 | 0.0 | 0.0 | | 14 | 0.0000 | 0.0 | 0.0 | | 15 | 0.0000 | 0.0 | 0.0 | | 16 | 0.0000 | 0.0 | 0.0 | | 17 | 0.0000 | 0.0 | 0.0 | | 18 | 0.0000 | 0.0 | 0.0 | | 19 | 0.0000 | 0.0 | 0.0 | | 20 | 0.0000 | 0.0 | 0.0 | | 21 | 0.0000 | 0.0 | 0.0 | | 22 | 0.0000 | 0.0 | 0.0 | | 23 | 0.0000 | 0.0 | 0.0 | | 24 | 0.0000 | 0.0 | 0.0 | | 25 | 0.0000 | 0.0 | 0.0 | | 26 | 0.0000 | 0.0 | 0.0 | +----+-------------------+-------------+----------------------+ +----+--------------------------------------------------------------+ | | Pupil values | | +------------------+-------------------+-----------+-----------+ | | Quadrant balance | cQuadrant balance | Balance X | Balance Y | | | [%] | [%] | [%] | [%] | +====+==================+===================+===========+===========+ | 0 | 0.3 | 2.2 | 0.2 | 0.1 | | 1 | 0.3 | 1.8 | 0.1 | 0.0 | | 2 | 0.5 | 1.7 | 0.2 | 0.3 | | 3 | 0.9 | 1.9 | 0.1 | 0.2 | | 4 | 0.8 | 1.8 | 0.0 | 0.1 | | 5 | 0.0 | 0.0 | 0.0 | 0.0 | | 6 | 0.0 | 0.0 | 0.0 | 0.0 | | 7 | 0.0 | 0.0 | 0.0 | 0.0 | | 8 | 0.0 | 0.0 | 0.0 | 0.0 | | 9 | 0.0 | 0.0 | 0.0 | 0.0 | | 10 | 0.0 | 0.0 | 0.0 | 0.0 | | 11 | 0.0 | 0.0 | 0.0 | 0.0 | | 12 | 0.0 | 0.0 | 0.0 | 0.0 | | 13 | 0.0 | 0.0 | 0.0 | 0.0 | | 14 | 0.0 | 0.0 | 0.0 | 0.0 | | 15 | 0.0 | 0.0 | 0.0 | 0.0 | | 16 | 0.0 | 0.0 | 0.0 | 0.0 | | 17 | 0.0 | 0.0 | 0.0 | 0.0 | | 18 | 0.0 | 0.0 | 0.0 | 0.0 | | 19 | 0.0 | 0.0 | 0.0 | 0.0 | | 20 | 0.0 | 0.0 | 0.0 | 0.0 | | 21 | 0.0 | 0.0 | 0.0 | 0.0 | | 22 | 0.0 | 0.0 | 0.0 | 0.0 | | 23 | 0.0 | 0.0 | 0.0 | 0.0 | | 24 | 0.0 | 0.0 | 0.0 | 0.0 | | 25 | 0.0 | 0.0 | 0.0 | 0.0 | | 26 | 0.0 | 0.0 | 0.0 | 0.0 | +----+------------------+-------------------+-----------+-----------+ +----+--------------+ | | Pupil values | | +--------------+ | | Nr. of poles | +====+==============+ | 0 | 0 | | 1 | 0 | | 2 | 0 | | 3 | 0 | | 4 | 0 | | 5 | 0 | | 6 | 0 | | 7 | 0 | | 8 | 0 | | 9 | 0 | | 10 | 0 | | 11 | 0 | | 12 | 0 | | 13 | 0 | | 14 | 0 | | 15 | 0 | | 16 | 0 | | 17 | 0 | | 18 | 0 | | 19 | 0 | | 20 | 0 | | 21 | 0 | | 22 | 0 | | 23 | 0 | | 24 | 0 | | 25 | 0 | | 26 | 0 | +----+--------------+ Pole pos. and orientation per pinhole pole_orient_matrix +----+--------+--------+--------+--------+--------+--------+--------+ | | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | +====+========+========+========+========+========+========+========+ | 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | +----+--------+--------+--------+--------+--------+--------+--------+ +----+--------+ | | Pole 8 | +====+========+ | 0 | 0.0 | | 1 | 0.0 | | 2 | 0.0 | | 3 | 0.0 | | 4 | 0.0 | | 5 | 0.0 | | 6 | 0.0 | | 7 | 0.0 | | 8 | 0.0 | | 9 | 0.0 | | 10 | 0.0 | | 11 | 0.0 | | 12 | 0.0 | | 13 | 0.0 | | 14 | 0.0 | | 15 | 0.0 | | 16 | 0.0 | | 17 | 0.0 | | 18 | 0.0 | | 19 | 0.0 | | 20 | 0.0 | | 21 | 0.0 | | 22 | 0.0 | | 23 | 0.0 | | 24 | 0.0 | | 25 | 0.0 | | 26 | 0.0 | +----+--------+ pole_width_matrix +----+--------+--------+--------+--------+--------+--------+--------+ | | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | +====+========+========+========+========+========+========+========+ | 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | +----+--------+--------+--------+--------+--------+--------+--------+ +----+--------+ | | Pole 8 | +====+========+ | 0 | 0.0 | | 1 | 0.0 | | 2 | 0.0 | | 3 | 0.0 | | 4 | 0.0 | | 5 | 0.0 | | 6 | 0.0 | | 7 | 0.0 | | 8 | 0.0 | | 9 | 0.0 | | 10 | 0.0 | | 11 | 0.0 | | 12 | 0.0 | | 13 | 0.0 | | 14 | 0.0 | | 15 | 0.0 | | 16 | 0.0 | | 17 | 0.0 | | 18 | 0.0 | | 19 | 0.0 | | 20 | 0.0 | | 21 | 0.0 | | 22 | 0.0 | | 23 | 0.0 | | 24 | 0.0 | | 25 | 0.0 | | 26 | 0.0 | +----+--------+ Verification Results Changed Test Constants [0] Name : Chuck id Used value String : CHUCK2 Default value String : CHUCK1 Unit : [1] Name : TIS ratio sensor Used value String : TIS_1_TRP Default value String : TIS_1_TR Unit :