Metrology Calibration: TIS At Multiple Illumination Settings Operator:ASML Machine: Release:4.1.0 Date:11/11/2017 Time:10:48 OK: Test finished successfully Test Info : Perform Measurements and Model Reticle ID : 45558461B012 Clearout reticle : Yes Chuck ID : Chuck 1 Perform TAMIS xy measurements : Yes No. of cycles for TAMIS xy : 4 Layout for TAMIS xy : 1x13 Perform TAMIS z measurements : No No. of cycles for TAMIS z : n.a. Layout for TAMIS z : n.a. Output File : XXXX_post_pot_11Nov17 Comment : Machine ID : Machine Type : 750 Lens ID : 0109514z ELLE ID : 000000 Measurements Info Prepare Machine : Ready Measure TAMIS xy : Ready Measure TAMIS z : Skipped Cleanup Machine : Ready Date/time of measurement : 11/11/2017 10:37 Lens Temperature [deg C] : 22.00 Lens Pressure [mbar] : 998.58 Modelling Info Model : Ready Input File : XXXX_post_pot_11Nov17 TAMIS sensitivity file used : EM/EMTA/EMTA_lens_type_70.dat Date/time of modelling : 11/11/2017 10:48 Summary of data (for TAMIS xy) +-------------------------------------------------------------------------+ | Aberrations (integrated) repro in 3 sigma | +-------+--------+------------+---------+---------------+--------+--------+ | | Offset |Offset repro|Tilt in X|Tilt in X repro| Min | Max | | | [nm] | [nm] | [nm/cm] | [nm/cm] | [nm] | [nm] | +=======+========+============+=========+===============+========+========+ | Z7 | -3.65 | 0.30 | -0.29 | 0.33 | -5.99 | -0.06 | | Z8 | 1.51 | 0.18 | -0.19 | 0.14 | 0.89 | 1.95 | +-------+--------+------------+---------+---------------+--------+--------+ +----------------------------+ |Aberrations (non-integrated)| +--------+---------+---------+ | | Min | Max | | | [nm] | [nm] | +========+=========+=========+ | Z7 | -5.99 | -0.06 | | Z8 | 0.89 | 1.95 | +--------+---------+---------+ Quality Data (non-integrated for TAMIS xy) +--------------------------+ |Aberration repro (3 sigma)| +--------+--------+--------+ | | Mean | Max | | | [nm] | [nm] | +========+========+========+ | Z7 | 0.55 | 0.78 | | Z8 | 0.44 | 0.79 | +--------+--------+--------+ Aberration data (integrated for TAMIS xy) +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z7 | Z7 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | -5.30 | 0.59 | | -10.60 | -4.36 | 0.64 | | -8.48 | -4.45 | 0.33 | | -6.36 | -0.73 | 0.61 | | -4.24 | -0.06 | 0.39 | | -2.12 | -1.07 | 0.46 | | 0.00 | -3.97 | 0.25 | | 2.12 | -5.80 | 0.54 | | 4.24 | -5.99 | 0.78 | | 6.36 | -5.65 | 0.30 | | 8.48 | -3.04 | 0.74 | | 10.60 | -3.07 | 0.56 | | 12.72 | -3.96 | 0.63 | +--------+--------+--------+ +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z8 | Z8 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 1.95 | 0.46 | | -10.60 | 1.60 | 0.14 | | -8.48 | 1.70 | 0.44 | | -6.36 | 1.75 | 0.33 | | -4.24 | 1.82 | 0.46 | | -2.12 | 0.99 | 0.13 | | 0.00 | 1.42 | 0.17 | | 2.12 | 1.26 | 0.79 | | 4.24 | 1.90 | 0.33 | | 6.36 | 0.89 | 0.48 | | 8.48 | 1.52 | 0.54 | | 10.60 | 1.82 | 0.53 | | 12.72 | 1.05 | 0.43 | +--------+--------+--------+ Aberration data (non-integrated for TAMIS xy) +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z7 | Z7 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 0.000 | -5.30 | 0.59 | | -10.60 | 0.000 | -4.36 | 0.64 | | -8.48 | 0.000 | -4.45 | 0.33 | | -6.36 | 0.000 | -0.73 | 0.61 | | -4.24 | 0.000 | -0.06 | 0.39 | | -2.12 | 0.000 | -1.07 | 0.46 | | 0.00 | 0.000 | -3.97 | 0.25 | | 2.12 | 0.000 | -5.80 | 0.54 | | 4.24 | 0.000 | -5.99 | 0.78 | | 6.36 | 0.000 | -5.65 | 0.30 | | 8.48 | 0.000 | -3.04 | 0.74 | | 10.60 | 0.000 | -3.07 | 0.56 | | 12.72 | 0.000 | -3.96 | 0.63 | +--------+---------+--------+--------+ +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z8 | Z8 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 0.000 | 1.95 | 0.46 | | -10.60 | 0.000 | 1.60 | 0.14 | | -8.48 | 0.000 | 1.70 | 0.44 | | -6.36 | 0.000 | 1.75 | 0.33 | | -4.24 | 0.000 | 1.82 | 0.46 | | -2.12 | 0.000 | 0.99 | 0.13 | | 0.00 | 0.000 | 1.42 | 0.17 | | 2.12 | 0.000 | 1.26 | 0.79 | | 4.24 | 0.000 | 1.90 | 0.33 | | 6.36 | 0.000 | 0.89 | 0.48 | | 8.48 | 0.000 | 1.52 | 0.54 | | 10.60 | 0.000 | 1.82 | 0.53 | | 12.72 | 0.000 | 1.05 | 0.43 | +--------+---------+--------+--------+ Sensitivity data (for TAMIS xy) +-------------------------------------------------------------------+ | Shifts in X | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z2 | Z7 |model| +========+=========+=========+============+=========+=========+=====+ | 0.70 | 0.550 | 0.850 | annular | -1.422 | -0.954 | Y | | 0.54 | 0.550 | 0.850 | annular | -1.422 | 0.655 | Y | | 0.50 | 0.000 | 0.438 | conven. | -1.422 | 2.244 | Y | | 0.50 | 0.550 | 0.850 | annular | -1.422 | 0.880 | Y | +--------+---------+---------+------------+---------+---------+-----+ +-------------------------------------------------------------------+ | Shifts in Y | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z3 | Z8 |model| +========+=========+=========+============+=========+=========+=====+ | 0.70 | 0.550 | 0.850 | annular | -1.422 | -0.954 | Y | | 0.54 | 0.550 | 0.850 | annular | -1.422 | 0.655 | Y | | 0.50 | 0.000 | 0.438 | conven. | -1.422 | 2.244 | Y | | 0.50 | 0.550 | 0.850 | annular | -1.422 | 0.880 | Y | +--------+---------+---------+------------+---------+---------+-----+ THE FOLLOWING CORRECTIONS SHOULD BE APPLIED TO THE MACHINE CONSTANTS: +-----------------------------------+------------+------------+------------+ | | Reference | Correction | New | +===================================+============+============+============+ | IMAGE QUALITY (KI) MCs | | | | | | | | | | Reticle Stage Height [um] | 0.000 | 0.000 | 0.000 | | Lens Element 1 [um] | 0.861 | -0.017 | 0.844 | | Lens Element 2 [um] | -0.088 | 0.147 | 0.059 | | Wavelength Shift [pm] | 5.934 | 0.572 | 6.507 | | | | | | | MEAS. SYS. INTERFEROM. (MI) MCs | | | | | | | | | | Reticle Stage Height [um] | 9.024 | -0.227 | 8.797 | | | | | | | HEIGHT AND TILT EXPOSURE (KU) MCs | | | | | | | | | | Chuck: 1 | | | | | Lens to Stage Offset [um] | -0.163 | -0.100 | -0.262 | | | | | | | Chuck: 2 | | | | | Lens to Stage Offset [um] | -0.786 | -0.100 | -0.885 | +-----------------------------------+------------+------------+------------+ New Machine Constants Saved : No