Metrology Calibration: TIS At Multiple Illumination Settings Operator:ASML Machine: Release:4.1.0 Date:01/11/2024 Time:11:46 OK: Test finished successfully Test Info : Perform Measurements and Model Reticle ID : 45558461B012 Clearout reticle : Yes Chuck ID : Chuck 1 Perform TAMIS xy measurements : Yes No. of cycles for TAMIS xy : 2 Layout for TAMIS xy : 3x13 Perform TAMIS z measurements : Yes No. of cycles for TAMIS z : 2 Layout for TAMIS z : 3x13 Output File : _20240111 Comment : run to check for stability Machine ID : Machine Type : 850B Lens ID : 0120236a ELLE ID : 000000 Measurements Info Prepare Machine : Ready Measure TAMIS xy : Ready Measure TAMIS z : Ready Cleanup Machine : Ready Date/time of measurement : 01/11/2024 11:33 Lens Temperature [deg C] : 22.00 Lens Pressure [mbar] : 982.45 Modelling Info Model : Ready Input File : _20240111 TAMIS sensitivity file used : EM/EMTA/EMTA_lens_type_08.dat Date/time of modelling : 01/11/2024 11:46 Summary of data (for TAMIS xy) +-------------------------------------------------------------------------+ | Aberrations (integrated) repro in 3 sigma | +-------+--------+------------+---------+---------------+--------+--------+ | | Offset |Offset repro|Tilt in X|Tilt in X repro| Min | Max | | | [nm] | [nm] | [nm/cm] | [nm/cm] | [nm] | [nm] | +=======+========+============+=========+===============+========+========+ | Z7 | 1.35 | 0.36 | 1.30 | 0.19 | -1.67 | 3.71 | | Z8 | 1.30 | 0.31 | 0.09 | 0.27 | 0.78 | 1.98 | +-------+--------+------------+---------+---------------+--------+--------+ +----------------------------+ |Aberrations (non-integrated)| +--------+---------+---------+ | | Min | Max | | | [nm] | [nm] | +========+=========+=========+ | Z7 | -2.29 | 3.95 | | Z8 | 0.28 | 3.08 | +--------+---------+---------+ Quality Data (non-integrated for TAMIS xy) +--------------------------+ |Aberration repro (3 sigma)| +--------+--------+--------+ | | Mean | Max | | | [nm] | [nm] | +========+========+========+ | Z7 | 1.10 | 2.90 | | Z8 | 0.94 | 2.32 | +--------+--------+--------+ Summary of data (for TAMIS z) +---------------------------------------------------------+ | Aberrations (integrated) | +-------+--------+----------------------+--------+--------+ | | Offset |Offset repro (3 sigma)| Min | Max | | | [nm] | [nm] | [nm] | [nm] | +=======+========+======================+========+========+ | Z9 | -3.86 | 0.37 | -4.97 | -2.36 | | Z12 | 0.13 | 0.19 | -2.00 | 2.48 | +-------+--------+----------------------+--------+--------+ +----------------------------+ |Aberrations (non-integrated)| +--------+---------+---------+ | | Min | Max | | | [nm] | [nm] | +========+=========+=========+ | Z9 | -5.46 | -2.03 | | Z12 | -2.91 | 2.53 | +--------+---------+---------+ Quality Data (non-integrated for TAMIS z) +--------------------------+ |Aberration repro (3 sigma)| +--------+--------+--------+ | | Mean | Max | | | [nm] | [nm] | +========+========+========+ | Z9 | 0.38 | 0.84 | | Z12 | 1.06 | 3.18 | +--------+--------+--------+ Aberration data (integrated for TAMIS xy) +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z7 | Z7 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | -1.67 | 0.68 | | -10.60 | -0.93 | 0.61 | | -8.48 | 0.81 | 0.61 | | -6.36 | 1.50 | 0.34 | | -4.24 | 0.99 | 0.53 | | -2.12 | 2.56 | 1.11 | | 0.00 | 1.89 | 0.42 | | 2.12 | 1.61 | 0.98 | | 4.24 | 2.76 | 0.57 | | 6.36 | 1.03 | 0.97 | | 8.48 | 1.41 | 0.53 | | 10.60 | 1.95 | 0.72 | | 12.72 | 3.71 | 0.57 | +--------+--------+--------+ +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z8 | Z8 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 1.24 | 0.61 | | -10.60 | 1.33 | 0.61 | | -8.48 | 1.04 | 0.43 | | -6.36 | 0.78 | 0.22 | | -4.24 | 0.91 | 0.76 | | -2.12 | 1.18 | 0.45 | | 0.00 | 1.42 | 0.59 | | 2.12 | 1.90 | 1.16 | | 4.24 | 1.98 | 0.55 | | 6.36 | 1.71 | 0.62 | | 8.48 | 1.66 | 0.58 | | 10.60 | 0.92 | 0.62 | | 12.72 | 0.82 | 0.88 | +--------+--------+--------+ Aberration data (integrated for TAMIS z) +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z9 | Z9 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | -3.31 | 0.30 | | -10.60 | -4.24 | 0.33 | | -8.48 | -3.96 | 0.56 | | -6.36 | -4.09 | 0.71 | | -4.24 | -4.72 | 0.73 | | -2.12 | -4.97 | 0.52 | | 0.00 | -4.76 | 0.79 | | 2.12 | -4.11 | 0.36 | | 4.24 | -3.08 | 0.56 | | 6.36 | -2.36 | 0.33 | | 8.48 | -2.65 | 0.38 | | 10.60 | -4.11 | 0.42 | | 12.72 | -3.81 | 0.45 | +--------+--------+--------+ +--------+--------+--------+ | |Average |3 Sigma | | +--------+--------+ | X | Z12 | Z12 | | [mm] | [nm] | [nm] | +========+========+========+ | -12.72 | 1.26 | 0.35 | | -10.60 | -1.45 | 0.68 | | -8.48 | -2.00 | 0.89 | | -6.36 | -1.63 | 1.25 | | -4.24 | -0.03 | 0.81 | | -2.12 | 0.01 | 0.88 | | 0.00 | 0.28 | 0.88 | | 2.12 | 1.01 | 0.74 | | 4.24 | 1.66 | 1.00 | | 6.36 | 2.48 | 0.23 | | 8.48 | 1.08 | 0.69 | | 10.60 | -1.08 | 0.74 | | 12.72 | 0.10 | 0.25 | +--------+--------+--------+ Aberration data (non-integrated for TAMIS xy) +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z7 | Z7 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | -2.29 | 0.88 | | -12.72 | 0.000 | -1.37 | 0.84 | | -12.72 | -1.802 | -1.36 | 0.60 | | -10.60 | 1.802 | -1.18 | 1.64 | | -10.60 | 0.000 | -0.70 | 1.32 | | -10.60 | -1.802 | -0.93 | 0.26 | | -8.48 | 1.802 | 0.86 | 1.15 | | -8.48 | 0.000 | 0.60 | 0.81 | | -8.48 | -1.802 | 0.96 | 1.72 | | -6.36 | 1.802 | 1.42 | 0.33 | | -6.36 | 0.000 | 1.41 | 0.42 | | -6.36 | -1.802 | 1.66 | 1.05 | | -4.24 | 1.802 | 1.12 | 0.12 | | -4.24 | 0.000 | 0.49 | 0.64 | | -4.24 | -1.802 | 1.37 | 0.12 | | -2.12 | 1.802 | 2.39 | 2.07 | | -2.12 | 0.000 | 3.48 | 0.34 | | -2.12 | -1.802 | 1.80 | 0.96 | | 0.00 | 1.802 | 2.28 | 0.25 | | 0.00 | 0.000 | 1.70 | 0.42 | | 0.00 | -1.802 | 1.70 | 0.65 | | 2.12 | 1.802 | 2.37 | 1.19 | | 2.12 | 0.000 | 0.81 | 1.35 | | 2.12 | -1.802 | 1.63 | 0.40 | | 4.24 | 1.802 | 2.95 | 1.23 | | 4.24 | 0.000 | 2.94 | 1.22 | | 4.24 | -1.802 | 2.40 | 0.25 | | 6.36 | 1.802 | 0.50 | 1.25 | | 6.36 | 0.000 | 1.19 | 2.90 | | 6.36 | -1.802 | 1.40 | 0.48 | | 8.48 | 1.802 | 1.07 | 1.17 | | 8.48 | 0.000 | 1.51 | 0.79 | | 8.48 | -1.802 | 1.66 | 0.70 | | 10.60 | 1.802 | 2.23 | 2.29 | | 10.60 | 0.000 | 1.72 | 1.05 | | 10.60 | -1.802 | 1.89 | 0.55 | | 12.72 | 1.802 | 3.94 | 1.10 | | 12.72 | 0.000 | 3.23 | 0.81 | | 12.72 | -1.802 | 3.95 | 0.15 | +--------+---------+--------+--------+ +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z8 | Z8 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | 0.70 | 0.22 | | -12.72 | 0.000 | 1.67 | 0.76 | | -12.72 | -1.802 | 1.35 | 0.66 | | -10.60 | 1.802 | 1.07 | 0.83 | | -10.60 | 0.000 | 1.38 | 1.22 | | -10.60 | -1.802 | 1.52 | 1.57 | | -8.48 | 1.802 | 0.70 | 0.45 | | -8.48 | 0.000 | 1.08 | 0.06 | | -8.48 | -1.802 | 1.33 | 0.85 | | -6.36 | 1.802 | 0.95 | 0.26 | | -6.36 | 0.000 | 0.59 | 0.04 | | -6.36 | -1.802 | 0.82 | 0.18 | | -4.24 | 1.802 | 1.45 | 1.59 | | -4.24 | 0.000 | 0.70 | 0.64 | | -4.24 | -1.802 | 0.57 | 1.30 | | -2.12 | 1.802 | 1.39 | 0.31 | | -2.12 | 0.000 | 0.86 | 0.65 | | -2.12 | -1.802 | 1.28 | 1.07 | | 0.00 | 1.802 | 1.19 | 0.61 | | 0.00 | 0.000 | 1.11 | 0.60 | | 0.00 | -1.802 | 1.97 | 0.72 | | 2.12 | 1.802 | 3.08 | 0.08 | | 2.12 | 0.000 | 1.30 | 0.63 | | 2.12 | -1.802 | 1.32 | 1.05 | | 4.24 | 1.802 | 2.29 | 0.48 | | 4.24 | 0.000 | 2.13 | 0.19 | | 4.24 | -1.802 | 1.53 | 1.15 | | 6.36 | 1.802 | 1.42 | 0.40 | | 6.36 | 0.000 | 1.99 | 0.66 | | 6.36 | -1.802 | 1.73 | 1.91 | | 8.48 | 1.802 | 1.87 | 0.65 | | 8.48 | 0.000 | 1.26 | 0.04 | | 8.48 | -1.802 | 1.86 | 1.54 | | 10.60 | 1.802 | 0.93 | 0.05 | | 10.60 | 0.000 | 1.36 | 0.09 | | 10.60 | -1.802 | 0.48 | 1.52 | | 12.72 | 1.802 | 1.14 | 1.06 | | 12.72 | 0.000 | 0.28 | 2.32 | | 12.72 | -1.802 | 1.05 | 1.02 | +--------+---------+--------+--------+ Aberration data (non-integrated for TAMIS z) +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z9 | Z9 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | -3.51 | 0.81 | | -12.72 | 0.000 | -3.13 | 0.11 | | -12.72 | -1.802 | -3.29 | 0.08 | | -10.60 | 1.802 | -4.06 | 0.84 | | -10.60 | 0.000 | -4.42 | 0.61 | | -10.60 | -1.802 | -4.25 | 0.13 | | -8.48 | 1.802 | -3.45 | 0.44 | | -8.48 | 0.000 | -4.03 | 0.43 | | -8.48 | -1.802 | -4.41 | 0.35 | | -6.36 | 1.802 | -3.54 | 0.32 | | -6.36 | 0.000 | -3.96 | 0.62 | | -6.36 | -1.802 | -4.76 | 0.26 | | -4.24 | 1.802 | -3.98 | 0.28 | | -4.24 | 0.000 | -5.26 | 0.29 | | -4.24 | -1.802 | -4.92 | 0.01 | | -2.12 | 1.802 | -4.59 | 0.65 | | -2.12 | 0.000 | -4.87 | 0.27 | | -2.12 | -1.802 | -5.46 | 0.23 | | 0.00 | 1.802 | -3.94 | 0.44 | | 0.00 | 0.000 | -5.18 | 0.43 | | 0.00 | -1.802 | -5.15 | 0.22 | | 2.12 | 1.802 | -3.88 | 0.42 | | 2.12 | 0.000 | -3.98 | 0.11 | | 2.12 | -1.802 | -4.47 | 0.03 | | 4.24 | 1.802 | -2.70 | 0.62 | | 4.24 | 0.000 | -3.62 | 0.08 | | 4.24 | -1.802 | -2.90 | 0.07 | | 6.36 | 1.802 | -2.48 | 0.37 | | 6.36 | 0.000 | -2.03 | 0.09 | | 6.36 | -1.802 | -2.55 | 0.26 | | 8.48 | 1.802 | -2.31 | 0.11 | | 8.48 | 0.000 | -2.71 | 0.56 | | 8.48 | -1.802 | -2.94 | 0.04 | | 10.60 | 1.802 | -3.77 | 0.07 | | 10.60 | 0.000 | -4.07 | 0.02 | | 10.60 | -1.802 | -4.50 | 0.52 | | 12.72 | 1.802 | -3.36 | 0.44 | | 12.72 | 0.000 | -4.09 | 0.18 | | 12.72 | -1.802 | -3.98 | 0.09 | +--------+---------+--------+--------+ +--------+---------+--------+--------+ | | |Average |3 Sigma | | | +--------+--------+ | X | Y | Z12 | Z12 | | [mm] | [mm] | [nm] | [nm] | +========+=========+========+========+ | -12.72 | 1.802 | 1.24 | 0.70 | | -12.72 | 0.000 | 1.35 | 0.66 | | -12.72 | -1.802 | 1.21 | 0.90 | | -10.60 | 1.802 | -0.98 | 0.27 | | -10.60 | 0.000 | -1.76 | 1.51 | | -10.60 | -1.802 | -1.59 | 1.22 | | -8.48 | 1.802 | -2.91 | 0.30 | | -8.48 | 0.000 | -1.54 | 0.21 | | -8.48 | -1.802 | -1.56 | 0.66 | | -6.36 | 1.802 | -2.24 | 0.07 | | -6.36 | 0.000 | -2.23 | 1.94 | | -6.36 | -1.802 | -0.44 | 0.49 | | -4.24 | 1.802 | 0.25 | 2.29 | | -4.24 | 0.000 | -0.52 | 0.56 | | -4.24 | -1.802 | 0.17 | 1.03 | | -2.12 | 1.802 | 0.68 | 0.94 | | -2.12 | 0.000 | 0.14 | 0.89 | | -2.12 | -1.802 | -0.79 | 0.20 | | 0.00 | 1.802 | -0.39 | 1.57 | | 0.00 | 0.000 | 0.32 | 0.99 | | 0.00 | -1.802 | 0.91 | 0.81 | | 2.12 | 1.802 | 1.00 | 0.92 | | 2.12 | 0.000 | 0.38 | 0.02 | | 2.12 | -1.802 | 1.66 | 0.07 | | 4.24 | 1.802 | 2.09 | 1.38 | | 4.24 | 0.000 | 1.36 | 3.18 | | 4.24 | -1.802 | 1.52 | 0.69 | | 6.36 | 1.802 | 2.47 | 0.68 | | 6.36 | 0.000 | 2.43 | 0.12 | | 6.36 | -1.802 | 2.53 | 0.52 | | 8.48 | 1.802 | 1.05 | 0.12 | | 8.48 | 0.000 | 0.85 | 2.33 | | 8.48 | -1.802 | 1.35 | 0.75 | | 10.60 | 1.802 | -1.79 | 0.03 | | 10.60 | 0.000 | -0.58 | 0.11 | | 10.60 | -1.802 | -0.87 | 0.95 | | 12.72 | 1.802 | 0.11 | 0.14 | | 12.72 | 0.000 | 0.28 | 0.08 | | 12.72 | -1.802 | -0.09 | 0.55 | +--------+---------+--------+--------+ Sensitivity data (for TAMIS xy) +-------------------------------------------------------------------+ | Shifts in X | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z2 | Z7 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.650 | 0.890 | annular | -1.270 | -1.559 | Y | | 0.75 | 0.495 | 0.751 | annular | -1.270 | 0.194 | Y | | 0.65 | 0.135 | 0.385 | annular | -1.270 | 2.004 | Y | | 0.60 | 0.570 | 0.890 | annular | -1.270 | 0.606 | Y | +--------+---------+---------+------------+---------+---------+-----+ +-------------------------------------------------------------------+ | Shifts in Y | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z3 | Z8 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.650 | 0.890 | annular | -1.270 | -1.559 | Y | | 0.75 | 0.495 | 0.751 | annular | -1.270 | 0.194 | Y | | 0.65 | 0.135 | 0.385 | annular | -1.270 | 2.004 | Y | | 0.60 | 0.570 | 0.890 | annular | -1.270 | 0.606 | Y | +--------+---------+---------+------------+---------+---------+-----+ Sensitivity data (for TAMIS z) +-------------------------------------------------------------------+ | Shifts in BF | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z4 | Z9 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.360 | 0.600 | annular | 5.264 | -1.697 | Y | | 0.80 | 0.505 | 0.745 | annular | 5.264 | 0.268 | Y | | 0.80 | 0.650 | 0.890 | annular | 5.264 | 1.996 | Y | | 0.60 | 0.145 | 0.417 | annular | 5.264 | -9.580 | Y | +--------+---------+---------+------------+---------+---------+-----+ +-------------------------------------------------------------------+ | Shifts in AST | +--------+-------------------+------------+---------+---------+-----+ | | Sigma | | | | | | +---------+---------+ | | | | | NA | inner | outer | mode | Z5 | Z12 |model| +========+=========+=========+============+=========+=========+=====+ | 0.80 | 0.360 | 0.600 | annular | -5.252 | 1.885 | Y | | 0.80 | 0.505 | 0.745 | annular | -5.252 | 2.295 | Y | | 0.80 | 0.650 | 0.890 | annular | -5.252 | 2.513 | Y | | 0.60 | 0.145 | 0.417 | annular | -5.252 | 8.249 | Y | +--------+---------+---------+------------+---------+---------+-----+ THE FOLLOWING CORRECTIONS SHOULD BE APPLIED TO THE MACHINE CONSTANTS: +-----------------------------------+------------+------------+------------+ | | Reference | Correction | New | +===================================+============+============+============+ | IMAGE QUALITY (KI) MCs | | | | | | | | | | Reticle Stage Height [um] | 0.000 | 0.000 | 0.000 | | Lens Element 1 [um] | -4.204 | 3.235 | -0.969 | | Lens Element 2 [um] | -7.369 | 4.295 | -3.074 | | Lens Element 3 [um] | -2.549 | 1.956 | -0.593 | | Wavelength Shift [pm] | 1.855 | -3.084 | -1.229 | | | | | | | MEAS. SYS. INTERFEROM. (MI) MCs | | | | | | | | | | Reticle Stage Height [um] | 20.275 | -0.065 | 20.210 | | | | | | | HEIGHT AND TILT EXPOSURE (KU) MCs | | | | | | | | | | Chuck: 1 | | | | | Lens to Stage Offset [um] | 0.819 | 0.217 | 1.037 | | | | | | | Chuck: 2 | | | | | Lens to Stage Offset [um] | 0.890 | 0.217 | 1.108 | +-----------------------------------+------------+------------+------------+ New Machine Constants Saved : No