Static Lens Qualification ; Focal Plane - ...n/Static/Single Energy/Model Static
Operator:TEC    Machine:7127    Release:8.9.0    Date:09/11/2024  Time:14:18


Exposure conditions:
  Exposure date and time                  : Wed Sep 11 12:52:41 2024
     
  Machine ID                              : 7127
  Reticle ID                              : 45562152P072            
  Reticle Alignment                       : TIS Align      
  Lens type                               : 01     
  Temperature                      [degC] :    21.99
  Pressure                         [mbar] :   982.53
  Illumination Mode                       : Annular      
  Numerical Aperture                      :     0.75
  Sigma Outer                             :     0.850        Inner   :  0.550
  Illumination mode name                  : annular          Version : 1.0.2   
  Lens ID                                 : 0118236A       
  Focus Step                         [um] :     0.10
  Focus Offset                       [um] :    -0.75
  Measured Focus Corr.               [um] :    -0.05
  Measured Tilt Ry Corr.           [urad] :     2.30
  Measured Linear Wedge Corr.      [urad] :     0.61
  Measured Ry Wedge Linear Corr. [urad/m] :    -2.25
  Number of wafers                        :     4

Comments:
  'Exposure'  :                                         
  'Modelling' :                                         

Data File Name : 7127_091124_read_1                                



FPD        [um] :     0.055  St. Dev. [um] :  0.017
AST        [um] :     0.044  St. Dev. [um] :  0.005
determined on   :    65      field positions.