PAS 5500 Illumination: Slit Uniformity
Operator:TEC    Machine:    Release:8.9.0    Date:07/20/2026  Time:00:54


   OK: Test finished successfully          

                         
Comment                : CON_0.60.42                             

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    14.000  Y :    11.271
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  4000
  Pulse Energy    [mJ] :     5.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Conventional 
  Numerical Aperture       :  0.60
  Sigma Outer              :  0.420
  Illumination mode name   : conventional     Version : 1.0.2   

Uniformity Measurement Results
  Uniformity        [%] :    0.67
  X-Tilt      [%/field] :    0.11
  Symmetrical error [%] :    0.62
  Logfile               : LI/LISU/waf.493                         

Overall Average of
  Ratio                                :      1.02  Standard Deviation :    0.01
  Intensities Spot Sensor     [mW/cm2] :    676.35  Standard Deviation :    4.00
  Intensities Energy Sensor   [mW/cm2] :    666.28  Standard Deviation :    0.16

Estimated Uniformity from measured data [%]
  If corrected for actual tilt :    0.66

Unicom
  Filter id     :-009 
  Position [mm] :   32.40
  Mode          : Automatic      

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -3.051912
  Position Y   [mm] :    0.000311
  Pointing X [mrad] :   -0.031666
  Pointing Y [mrad] :   -0.012134

Laser beam-drift during measurement
  Position X   [mm] :   -0.095716
  Position Y   [mm] :    0.047666
  Pointing X [mrad] :   -0.034087
  Pointing Y [mrad] :   -0.005426



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|   6.939328 |       1.007847     |
|   5.551463 |       1.003487     |
|   4.163597 |       0.999931     |
|   2.775731 |       0.997507     |
|   1.387866 |       0.996207     |
|   0.000000 |       0.995304     |
|  -1.387866 |       0.994398     |
|  -2.775731 |       0.996378     |
|  -4.163597 |       0.998398     |
|  -5.551463 |       1.003467     |
|  -6.939328 |       1.007076     |
+------------+--------------------+