PAS 5500 Illumination: Slit Uniformity
Operator:TEC    Machine:    Release:8.9.0    Date:07/16/2026  Time:21:58


   OK: Test finished successfully          

                         
Comment                : LS 0.51 0.36                            

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    14.000  Y :    11.271
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  4000
  Pulse Energy    [mJ] :     5.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Quadrupole   
  ID                       : 12-LOWSIGMA       
  Numerical Aperture       :  0.51
  Sigma Outer              :  0.360           Inner   :  0.000
  Illumination mode name   : low sigma        Version : 1.0.2   

Uniformity Measurement Results
  Uniformity        [%] :    1.20
  X-Tilt      [%/field] :    1.10
  Symmetrical error [%] :    0.84
  Logfile               : LI/LISU/waf.490                         

Overall Average of
  Ratio                                :      1.02  Standard Deviation :    0.01
  Intensities Spot Sensor     [mW/cm2] :    684.89  Standard Deviation :    5.85
  Intensities Energy Sensor   [mW/cm2] :    670.67  Standard Deviation :    0.17

Estimated Uniformity from measured data [%]
  If corrected for actual tilt :    0.90

Unicom
  Filter id     :-009 
  Position [mm] :   32.40
  Mode          : Automatic      

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -1.218081
  Position Y   [mm] :   -0.059855
  Pointing X [mrad] :    0.255840
  Pointing Y [mrad] :    0.002105

Laser beam-drift during measurement
  Position X   [mm] :   -0.047200
  Position Y   [mm] :   -0.186614
  Pointing X [mrad] :    0.004522
  Pointing Y [mrad] :   -0.028359



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|   6.939328 |       1.015694     |
|   5.551463 |       1.008396     |
|   4.163597 |       1.002079     |
|   2.775731 |       0.998283     |
|   1.387866 |       0.995995     |
|   0.000000 |       0.994328     |
|  -1.387866 |       0.991667     |
|  -2.775731 |       0.993351     |
|  -4.163597 |       0.994220     |
|  -5.551463 |       1.000679     |
|  -6.939328 |       1.005309     |
+------------+--------------------+