FILE_TYPE 03
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MACHINE_NUMBER
MACHINE_TYPE   /1150
COMMENT TZ=factory
SW_RELEASE 080900
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MAGIC_STRING tjs6WFU0{U7
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WAFER_STEPPER
OPTIONS
	SECS	KEY F0yLa9O|SL|
	ARMS	KEY pS4Gahvznx{
	PEP_1_PRODUCTIVITY_UPGRADE	KEY CIhb1SEwVjP
	RETICLE_ERROR_COMPENSATION	KEY ezPvMVMFY8K
	FLATNESS_MODEL	KEY F2JovRtTZOc
	LSQ_DISTO_MODEL	KEY UXIj48RoxRx
	MARK_SENSOR	KEY ElVc1Qr|e4h
	BATCH_STREAMING	KEY lFYB2{KiS3c
	FOCUS_MONITORING	KEY FvVlP0WBKE{
	AERIAL	KEY APX|FYqW5|6
	FOCAL_ADJUSTMENT	KEY lFYB2i8fS7|
	EXTERNAL_METROLOGY_INTERFACE	KEY 8TtkFYu16hR
	EXTENDED_EXPOSURE	KEY Y05A|Nx2DVF
	TIS	KEY ASSI|EHunUs
	ATHENA	KEY YWbG|UT8F{F
	AUTOMATED_DOE_EXCHANGER	KEY KK8oZvFTAFp
	WAFER_HANDLING_2	KEY UWMgT8VZpxx
	THICK_SUBSTRATES	KEY 4FBn|pyDMYz
	PHASE_MODULATOR_OA	KEY xcnKg{GiwL|
	FIELD_BOUNDARY_STITCHING	KEY Lx|gIGfU5jm
	SLOT_INTEGRITY	KEY F084gLPz9z{
	DOUBLE_EXPOSURE	KEY jgvYpK6Sl{F
	VARIABLE_LASER_FREQ_CNTRL	KEY CmZb0SCo|lP
	RETICLE_BLUE_ALIGN	KEY stFH0GYX8jR
	LEVEL_SENSOR_8SPOTS	KEY ngHvSr{FYO0
	CIRCUIT_DEPENDENT_FEC	KEY UWIz4OFow|x
	WS_TO_RS_IMPROVEMENT	KEY 5R|lP8Wf{iU
	ZERO_FIRST_OPTIMISATION	KEY |cXHyINuMKz
	MULTI_IMAGE_JOB	KEY U|FH0mYX0jP
	SPEED_UP_REMA_X	KEY 4X75EYbzvvz
	X_TILT_CORRECTION	KEY uenPSN{FYe0
	STEP_IMPROVEMENT_Q101	KEY 8vT7pBHe0WX
	STATIC_LEVELING_METHOD	KEY wl8q0no5OD5
	RETICLE_COOLING	KEY R94VCANhvxl
	LEVELING_OFFSET_PROFILE	KEY |cXJKm|u{K|
	WS_RS_IDLE_MODE_PARK	KEY SSfp|ztzcuw
	EXTENDED_EXPOSURE_TRANSLATION	KEY 8d3{|pS5SwL
	SUPPORT_HPMCA	KEY DptlPW03qky
	PEP_STEP_AND_EXPOSE_2	KEY EGSAjh{|pyl
	PEP_WAFER_SWAP_3	KEY F0KL6XQzU|N
	ALE	KEY 8BBs|py4Ipu
	LASER_4KHZ	KEY UVFH8nEX2FJ
	TEST_STREAMING	KEY sfuu|dPj4fs
	PEP_STEP_AND_EXPOSE_5	KEY TCfpwztzduh
	PEP_LEVEL_ALIGNMENT_4	KEY dzfvxdPe0fs
	PEP_LEVEL_ALIGNMENT_5	KEY BYhU7tvnwtT
	NARROW_MARKS	KEY pSBoZMXt3xp
	ALIGNMENT_REPORTS	KEY Z||hQ5sD1sf
	REMA_ARCH_C	KEY s|FpNOsjOqk
	WAFER_HANDLING_6	KEY lFYBI{4eC7s
	SHIFTED_MEASUREMENT_SCAN	KEY Mky|lxLGrj8
	DOSE_MAPPER_1	KEY F04rcf0TVzV
	INLINE_Q_ABOVE_P	KEY p{{hQ4YD8dz
	CO_LINEARITY	KEY i4eRp|Bpa5t
	ALIGNMENT_GRID_ACCURACY	KEY qWf3iCTw{lP
	ATHENA_FOCUS_IMPR_1	KEY XonX{|0WJoF
	CT_GLOBAL_CORRECTION_IMPR_1	KEY 8VBs|py5ocj
	TIS_REPRO_IMPR_1	KEY AH3|FYyWjti
	PREALIGNER_WAFER_COOLING	KEY F0e4WzHzBN{
	ECHUCK_FLATNESS_QUALIFICATION	KEY lgRIPN6ilB|
	FOCAL_RESOLUTION	KEY U06iDeVZxxx
	EDI_INTERFACE	KEY DZ3x|pS5C{5
	ATHENA_ALLOW_RED_ONLY	KEY K|Vcp05bZza
	IF_MODEL_IMPR_1	KEY ykM||kVA1GB
	PREALIGNER_WAFER_COOLING_2	KEY E9VlVBHCG83
	MULTIPLE_FTBU_SCAN	KEY 8vZzz||Ym7X
	TIS_REPRO_IMPR_2	KEY Y|hVxpy9g8M
	PEP_LEVEL_ALIGNMENT_8	KEY TCjpwztzduh
	ADVANCED_XPOL_ALGORITHM	KEY Ym5Vd2iTMlE
	ENHANCED_EXPOSURES_1	KEY DRBp|py5Moy
	ANNULAR_ILLUMINATION	KEY yW0bciTQ{lP
	ATHENA_ALLOW_HIGH_ORDERS	KEY V273vVtTc0I
	SCRIBELANE_MARKS	KEY gRhVFYSWdz4
	LIBRARY_CONFIG_2	KEY R8WF82txzxl
	LIBRARY_CONFIG_3	KEY yjNl|kZ2s40
	RETICLE_COOLING_PER_LAYER	KEY pgHvUr{FYOW
	VISUAL_ALIGNMENT_CAMERA	KEY h{|hQZwcaX|
	WAFER_TABLE_CLEANING	KEY |c1HIotnoKz
	FORCE_MEANDERING	KEY HOFFUlgm5gY
	PRESSURE_SENSOR_IMPR_2	KEY G|VcdG5a3ja
	WAFER_CLAMPING_DELAY	KEY 2c8R|FBpq5T
	MULTIPLE_FTBU_SCAN_2	KEY GdcZEcz|lgf
	SYSTEM_THERMAL_STABILITY	KEY SK0w3PFrgFp
	SYSTEM_TFH_WH_1	KEY 7jhy|py1o0{
	UNISCAN	KEY Q6hfL|tzZU1
	EXTENDED_TASK_QUEUE	KEY XxxhQ40XUi|
	GRID_MAPPER	KEY S0WfKCVQ{lP
	ROWBAR_CPE	KEY qR{3DRFpi1A