PAS 5500 Illumination: Slit Uniformity
Operator:TEC    Machine:    Release:8.9.0    Date:11/18/2024  Time:03:15


   OK: Test finished successfully          

                         
Comment                : CON_0.60.42                             

Measurement mode
  Scanning             : No         
  Start position       : Left Side  
  Meander direction    : X-direction

Measurement settings
  Fieldsize [mm]  X    :    14.000  Y :    11.271
  Steps           X    :    11      Y :    33
  Number of Pulses     :   100
  Pulse Frequency [Hz] :  4000
  Pulse Energy    [mJ] :     5.00

Miscellaneous
  Apply REMA Window    : Yes   

Illumination Mode
  Illumination Mode        : Conventional 
  Numerical Aperture       :  0.60
  Sigma Outer              :  0.420
  Illumination mode name   : conventional     Version : 1.0.2   

Uniformity Measurement Results
  Uniformity        [%] :    0.31
  X-Tilt      [%/field] :    0.56
  Symmetrical error [%] :    0.10
  Logfile               : LI/LISU/waf.71                          

Overall Average of
  Ratio                                :      1.00  Standard Deviation :    0.00
  Intensities Spot Sensor     [mW/cm2] :    777.87  Standard Deviation :    1.95
  Intensities Energy Sensor   [mW/cm2] :    774.61  Standard Deviation :    0.15

Estimated Uniformity from measured data [%]
  If corrected for actual tilt :    0.17

Unicom
  Filter id     : 
  Position [mm] :   32.40
  Mode          : Automatic      

Pre-expose
  Number of pre-expose pulses :       0

Initial Laser beam data
  Position X   [mm] :   -2.139579
  Position Y   [mm] :    0.440910
  Pointing X [mrad] :    0.033226
  Pointing Y [mrad] :    0.140272

Laser beam-drift during measurement
  Position X   [mm] :    0.069937
  Position Y   [mm] :   -0.035447
  Pointing X [mrad] :    0.023071
  Pointing Y [mrad] :   -0.004680



Slit profile

+------------+--------------------+
| Position X |Normalized Sum Ratio|
|    [mm]    |                    |
+============+====================+
|   6.939328 |       1.002736     |
|   5.551463 |       1.003716     |
|   4.163597 |       1.002372     |
|   2.775731 |       1.001256     |
|   1.387866 |       0.999756     |
|   0.000000 |       0.998808     |
|  -1.387866 |       0.997593     |
|  -2.775731 |       0.997947     |
|  -4.163597 |       0.998596     |
|  -5.551463 |       0.998925     |
|  -6.939328 |       0.998296     |
+------------+--------------------+